Aeronex® Gas Purfication Systems
Entegris Aeronex® Gas Purification Systems are stand-alone systems offering in-situ regeneration with advanced controls. The multi-bed design guarantees a continuous supply of pure gas so there is no need to send a purifier back for regeneration or to install a replacement purifier. The pre-programmed controller knows when to switch to the fresh purifier and when to regenerate the depleted purifier.
Aeronex® Gas Purification Systems offer maximum flow rates ranging from 120 SLM to 20,000 SLM. Applications include single-tool purification, multi-tool purification, facility purification, and other applications.
Aeronex® Gas Purification systems are available in an array of optional configurations to meet specific application requirements. Available options include manual or automatic bypass valves and online moisture indicators.
Download Entegris Aeronex® Gas Purification Systems Datasheets:
Hydrogen (H)
Nitrogen (I)
Ammonia (SK)
XCDA (Z)
XCDA (Z2)
Please visit our Resource Center for Material Safety Data Sheet (MSDS) information.