Chemicals used within the semiconductor industry fall into the cleanest grade of chemicals made – microelectronic-grade. Getting these chemicals from their source of manufacture to point-of-use requires highly engineered containers and careful handling to maintain these important cleanliness levels.
The International Technology Road Map for Semiconductors (ITRS) outlines increasingly higher levels of purity for chemicals in response to the drive towards smaller line widths. Today, the industry measures these levels in parts per trillion (PPT).
Purity tells only part of the story. Safety tells another. Containers must be designed to protect people and the environment. Increasingly stringent environmental regulations highlight this area of importance.
For 40 years, Entegris – the industry experts for materials integrity management solutions – has been committed to purifying, protecting and transporting the critical materials that enable the worlds leading technologies. Materials integrity management starts with the chemicals that come into direct contact with every wafer and IC produced. To safely handle high purity microelectronic-grade chemicals, Entegris offers bulk chemical containers and accessories specifically designed for the demands of the semiconductor industry.
As wafer sizes continue to increase and line widths shrink, purity requirements become more stringent and precise chemical blending becomes more critical. Whether it's transport or storage, mixing or dispense, Entegris has solutions to meet bulk chemical handling needs.
- Chemical transport
FluoroPure® packaging solutions meet your compatibility, purity and regulatory requirements. HDPE or PFA composite drums and intermediate bulk containers are available. With increasing demands on chemical purity, Entegris continues to develop new solutions to reduce a fab's operating cost and improve the value of chemical products. - Chemical storage
Entegris understands the industry need to maintain purity while storing valuable microelectronic-grade chemicals. FluoroPure® fluoropolymer blowmolded and rotomolded day tanks extend the benefits of storing chemicals in bulk and maximize operational efficiency. - Chemical delivery
As the leader in clean, safe fluoropolymer chemical container solutions, Entegris can also provide vessels customized to specifications. To assure against unsafe mixing and to minimize human exposure to chemical and fumes, the industry-standard SentryTM Quick Connect System can be used to remove chemical from the container. - Filtration
With a wide range of pore sizes, Entegris offers hydrophobic and hydrophilic MicrogardTM filters with superior wettability.