Bulk Chemical
FluoroPure® chemical containers and connections reliably provide pure chemical distribution, delivery, storage and transport.
Wafer Handling
Our wafer handling products protect and transport prime or reclaimed blank and prime wafers during multiple process steps of fabrication. In addition, we offer equipment to clean and dry wafer handling products.
Wet Etch & Clean
Ultrapure liquid and gases are purified, protected and transported with Entegris' filters, purifiers, valves, fittings, sensing and control products.
Lithography
The broad Entegris product line enables the crucial lithography processing within semiconductor fabrication from gas filters and diffusers, wafer and reticle handling, liquid filtration, purification and control.
Chemical Mechanical Planarization (CMP)
From filtration, liquid and slurry handling, Entegris products enable the CMP process.
Test, Assembly and Packaging
Within wafer dicing, testing, assembly and packaging, Entegris products protect and transport wafers and integrated circuits in various stages of completion.
Flat Panel Display
The expanding flat panel display industry relies on Entegris for handling substrates and filtering critical chemicals.
Disk Drive
Within the data storage industry, Entegris protects and transports heads/sliders, components and disks.
Fuel Cell Manufacturing
Entegris' core competencies in polymer material science and manufacturing enable us to provide advanced fuel cell materials, components, subassemblies and value-added services to fuel cell developers.
Reticle Handling
Entegris products offer reliable protection of quartz plate reticles and masks used in multiple process steps of the photolithographic process.