San Diego Convention Center
Tuesday, August 14 – 10:00 am – 5:00 pm
Wednesday, August 15 – 10:00 am – 5:00 pm
Thursday, August 16 – 10:00 am – 2:00 pm
Visit Entegris at Booth 1128!
Visit the SPIE Optics+Photonics website for more information on this event.
Attend the SPIE Optics+Photonics Exhibition and see more than 230 companies displaying the latest in optical components, devices and materials for a variety of important technologies (such as biomedical optics, organic photonics, nanotechnology and solar energy).
Featured technologies include:
Optical components, fabrication and design
Detectors, sensors and cameras
Lasers, accessories and laser systems
Computer hardware and software
Signal imaging and processing equipment
Positioning and vibration-isolation equipment
LED and OLED technology
Optical engineering software
Test, measurement and analysis equipment
SUPERSiC® Silicon Carbide
Entegris’ unique conversion process produces the highest quality silicon carbide products available on the market today. This process starts with graphite material specially designed and manufactured for use as the precursor in the conversion process.
Near-net shaped parts are machined in graphite, purified and subjected to a proprietary conversion process which substitutes pure silicon atoms for carbon atoms. During conversion, Entegris has the ability to fuse parts so that they enter the furnace as an assembly of individual pieces and exit as a monolithic unit, with properties indistinguishable from those of a part originally made from one piece. This is done without the use of adhesives or other bonding agents. This conversion bonding process enables the creation of extremely complex, lightweight structures for aerospace optics such as spaceflight worthy, closed-back, off-axis or aspherical mirrors for satellite systems. These material and process advantages have placed Entegris at the forefront of silicon carbide component development.
Precise dynamic response from an optic within a scanning system is paramount to its successful operation. Entegris scan mirrors made from SUPERSiC grade materials are lightweight but exceptionally stiff to provide the characteristics desired under rapid motion conditions. Designs may utilize open or closed-back structures for improved rigidity and stability. Laser-based applications where energy dissipation is a concern also benefit from SUPERSiC’s excellent thermal properties.
Precision dynamic response is not limited to optic alone. Lithography applications benefit from the mechanical performance of SUPERSiC as well. SUPERSiC silicon carbide provides considerable mechanical stiffness through a wide range of temperatures. Applying a CVD SiC coating on SUPERSiC components ensures protection against particulate contamination, effectively sealing the parts and making them lightweight, stiff and clean – all factors highly desired for lithography processing.
Telescope – Structures and Mirrors
Assembling a telescope with metering structures and optics made of the same material is the “Holy Grail” of material configurations. Using SUPERSiC materials for both structures and mirrors is a major advance towards optimal performance by eliminating errors induced from mismatched properties.
Space-based applications, in particular, benefit considerably from low coefficient of thermal expansion and high stiffness of SUPERSiC materials. The suite of options available – increased elastic modulus from SUPERSiC-Si grade, CVD SiC coatings, Si claddings, reflectance coatings and others – provide multiple selections for any design project.