COEX
Event Dates
Tuesday, February 7, 10:00 am - 5:00 pm
Wednesday, February 8, 10:00 am - 5:00 pm
Thursday, February 9, 10:00 am - 4:00 pm
Visit us at Booth 5606, 3rd Floor, COEX Hall D!
Visit SEMICON Korea 2012 for more information.
Click here to download the SEMICON Korea 2012 Exhibitor booth floor plan.
Featured Products
450 mm Wafer and Reticle Handling
Entegris will be displaying its new 450 mm wafer handling products as well as its new EUV reticle pod. Designed with collaboration from customers and consortiums, our featured technology products will support the industry’s move to 450 mm wafers and 22 nm lithography.
Advanced FOUP Environment Control
Driven by our customers' technology roadmaps, we provide unique and patented technologies with advanced microenvironment control in FOUPs.
Material Solutions
Material solutions for leading edge lithography, deposition, etch, implant and PV applications, through enhancement of strength, purity, thermal conductivity, stiffness and electrical properties.
Specialty Coatings
High-purity silicon coatings that protect chamber components while reducing metal contamination and defects.
PrimeLock™ Fittings
Designed to effectively handle temperatures up to 200°C (392°F) at 276 kPa (40 PSIG), the new PrimeLock series connection ensures leak-free performance in the most demanding chemical applications. At room temperature, PrimeLock fittings are rated at 827 kPa (120 psig). The ultraclean design provides enhanced reliability within your system, with an all-PFA wetted construction. Now available on CR 1/4" and 1/2” series valves and Integra® 3/4” and 1” series valves.
Watch PrimeLock Fitting Technology and Installation Overview
Search PrimeLock part numbers and request a quote on your mobile device.
Solar Market
Entegris brings a broad portfolio of proven contamination control, specialty materials, fluid management and substrate handling solutions to solve the challenges faced in your manufacturing environment. The new Wet Process Carrier provides wafer and cell manufactures with improved minority carrier lifetime, reduced cell marks and defects, and increased operational efficiencies. Offering process knowledge in materials science and contamination control, Entegris allows you to manage silicon cost more effectively, maximize cell productivity and reduce costs in your cell manufacturing.
Entegris is also featuring . . .
Compound Semiconductor (LED) Solutions
Entegris' purification and filtration products enable the manufacturing high brightness LEDs with the highest photoluminescence peaks and luminous efficiencies, while our 40+ years of wafer shipping experience allows us to design the ultimate protection for these critical substrates.