GateKeeper® Gas Purifiers
Entegris GateKeeper® purifiers remove gaseous contaminants down to part per trillion levels with inorganic media. GateKeeper® purifiers are a cost-effective way to prevent contamination of the process or damage to the tool.
Designed for ambient operation and requiring no power, GateKeepers® offer maximum flow rates ranging from 1 SLM to 20,000 SLM. Applications include gas-box installation, single-tool purification, multi-tool purification, facility purification, back-pad purifiers, Aeronex® Gas Purification System back-ups, and other applications.
Regenerable GateKeeper® gas purifiers are an environmentally friendly alternative to non-regenerable getter, organometallic resin and palladium based technologies.
Regeneration Services
GateKeeper® purifiers are available in a wide array of optional configurations to meet specific application requirements. Available options include inlet/outlet isolation valves, bypass manifolds and moisture breakthrough end-of-life detectors.
Download Entegris GateKeeper® Datasheets:
Corrosive (C)
Hydrogen (H)
Inert (I)
Carbon Monoxide (LK)
Hydride (SK)
Optics (O)
Nonreactive (N)
Please visit our Resource Center for Material Safety Data Sheet (MSDS) information.