Look for Entegris’ 450 mm prototype carrier featured in the October issue of
Solid State Technology magazine. The carrier is pictured in an article that discusses the semiconductor industry’s transition to 450 mm wafers called “Realizing the 450 mm Transition.” In the article, Entegris’ prototype is shown at the testing facility for the International SEMATECH Manufacturing Initiative (ISMI), the organization coordinating the research and 2012 transition to 450 mm. Entegris’ carrier with 10 mm pitch, along with a robotic test stand from Brooks, had cycled over 100k passes in testing at the time the article was written.
Click here to read the full article.