HBLED Gas Filtration
Gas filtration and flow control in HBLED applications
Wafergard® ultrapure gas filtration products offer 0.003 microns particle filtration for ultrapure gas applications. These HBLED gas filters enable higher process gas throughput while reducing the overall gas box footprint. Entegris' ultrapure gas filtration products are used by all major OEMs and device makers in HBLED (high brightness ligth emitting diodes) manufacturing applications. Entegris incorporates its gas filters into our gas purifiers to provide process and purge gases free from both molecular and particle contamination.
ChamberGard™ fast vent gas diffusers provide rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber, increasing system throughput by minimizing load lock vent cycle times. They combine the flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput.
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