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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com or entegrisfuelcells.com)

Hard Disk Drive Assembly

Liquid filters for Hard Disk Drive process chemistry in Data Storage applications

Developed from the Mykrolis® contamination control technologies, Entegris provides a broad portfolio of liquid filters for detergent, cutting, diamond CMP, CMP cleaning, photoresist coating, HMDS, thinner, developer, DI water, stripping, cleaning and jig coating chemistries and processes in hard disk drive (HDD) manufacturing applications such as device and mass storage memory.

Cleaning with Acids, Bases, Detergents and DI Water
Liquid filters for cleaning with acids, bases, detergents and DI Water
Clean Dry Air
Liquid and gas filters for cleaning dry air