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Semiconductor
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- Vacuum Processes
- Wafer Handling
- Wet Etch and Clean
Flat Panel Display
- Array Process
- Color Filter
- Facilities
- Photolithography
- Substrate Handling
- Thin Film Transistors
- Wet Etch and Clean
Compound Semiconductor
- Filtration
- Purification
Data Storage
- Hard Disk Drive Assembly
- Hard Disk Media
- Disk Drive & Component Handling
- Hard Disk Substrates
- Head Wafer and Backend Assembly
Aerospace
- Premium Graphite
- Specialty Coatings
Solar/Clean Energy
- Fuel Cells
- Lithium Ion Battery
Life Science
- Biopharmaceuticals
- Medical
- Fine and Specialty Chemicals
Emerging Technologies
- Electrostatic Clamp
- PVA Brushes

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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com or entegrisfuelcells.com)

Hard Disk Substrates

Liquid filters for substrate processes in data storage applications

Entegris provides a broad portfolio of liquid filters for aluminum and glass substrate manufacturing processes including: polishing, plating and cleaning with various aqueous chemicals and solvents like IPA.

Final Polishing Liquid and gas filters for final polishing	Cleaning with Weak Acids/Bases, Detergents and DI Water Liquid filters for cleaning with weak acids/bases, detergents and DI Water	Cleaning with Stronger Aqueous Chemicals Liquid filters for cleaning with stronger aqueous chemicals
Cleaning with IPA/Solvents Liquid filters for cleaning with IPA/Solvents	Nickel Plating Liquid filters for nickel plating