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Semiconductor
- CMP
- Facilities
- Implant Beamline
- Photolithography
- Plating
- Premium Graphite
- Specialty Coatings
- Vacuum Processes
- Wafer Handling
- Wet Etch and Clean
Flat Panel Display
- Array Process
- Color Filter
- Facilities
- Photolithography
- Substrate Handling
- Thin Film Transistors
- Wet Etch and Clean
Compound Semiconductor
- Filtration
- Purification
Data Storage
- Hard Disk Drive Assembly
- Hard Disk Media
- Disk Drive & Component Handling
- Hard Disk Substrates
- Head Wafer and Backend Assembly
Aerospace
- Premium Graphite
- Specialty Coatings
Solar/Clean Energy
- Fuel Cells
- Lithium Ion Battery
Life Science
Emerging Technologies
- Electrostatic Clamp
- PVA Brushes

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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Hard Disk Substrates

Liquid filters for substrate processes in data storage applications

Entegris provides a broad portfolio of liquid filters for aluminum, glass and hard disk substrate manufacturing processes including: polishing, plating and cleaning with various aqueous chemicals and solvents like IPA.

Final Polishing Liquid and gas filters for final polishing	Cleaning with Weak Acids/Bases, Detergents and DI Water Liquid filters for cleaning with weak acids/bases, detergents and DI Water	Cleaning with Stronger Aqueous Chemicals Liquid filters for cleaning with stronger aqueous chemicals
Cleaning with IPA/Solvents Liquid filters for cleaning with IPA/Solvents	Nickel Plating Liquid filters for nickel plating