Electrostatic Clamps that exhibit high clamping force and low backside particle count
Entegris is a pioneer in the fabrication and commercialization of ceramic Electrostatic Clamps and has been supplying to this industry for more than 10 years. Electrostatic Clamps, also called "E-chucks," have become essential tools in the silicon wafer processing industry. The clamps significantly increase usable wafer area and increase wafer throughput, both of which contribute to increased yields.
All Entegris Electrostatic Clamps are precision manufactured in-house.