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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com or entegrisfuelcells.com)

Facilities (BCDS and CDS)

Chemical delivery systems for flat panel display applications

Entegris provides a broad portfolio of liquid filters for chemical delivery systems and other facility related operations, including: acids, bases, solvents, developers and detergents. We also offer a complete line of PFA fluid handling components, including: valves, fittings, tubing and pipe in 1/4" to 2" sizes.

 

Fluid Handling Product Catalog   Fittings Mobile Selection Tool

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Filter Results: Your selection returned the following items within this category.
Chemlock® Housings

Designed for tool space saving and easy filter cartridge changeout.

Fluid Handling Components

Valves, fittings, tubing and pipe designed for use with high-purity corrosive chemicals.

Guardian™ Filters

Designed as a cost effective solution to a variety of chemistries: including high-pH solutions, copper and nickel plating applications.

Intercept® Cartridge and Disposable Filters

Most advanced dual-retention filtration for critical DHF/BOE cleaning applications

Microgard™ Filters

Designed for high retention efficiency water, chemical and photochemical applications.

Panelgard™ Filters

Designed for point-of-use filtration in flat panel display manufacturing applications.

QuickChange® Nondewetting PTFE Filters

Designed for use in advanced liquid filtration with both aqueous and non-aqueous chemistries. All PTFE membranes.

Savana® Filters

Designed for high-flow, longer-lifetime filter applicatoins with weak acids, bases and ultrapure DI water