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Entegris provides a broad portfolio of filtration and purification solutions for cell processes, including: pre-clean, post-clean, PI, rubbing cleaning, detergent, DI water cleaning, post cutting edge cleaning and one drop filling. We also offer a complete line of PFA fluid handling components, including: valves, fittings, tubing and pipe in 1/4" to 2" sizes.
Fluid Handling Product Catalog Fittings Mobile Selection Tool
Designed for the removal of gaseous contaminants down to part-per-trillion levels in continuous high-flow systems.
Valves, fittings, tubing and pipe designed for use with high-purity corrosive chemicals.
PTFE membrane filter designed to efficiently remove particles from a broad range of acids, bases, solvents and other process chemicals.
Designed for filtration of high-purity process fluids at very low flow rates.
Designed for the removal of gaseous contaminants down to part-per-trillion levels with inorganic media.
Designed to control particles in many photochemicals: including solvents and DI Water.
Designed for point-of-use filtration in flat panel display manufacturing applications.
Designed for prefiltration of DI Water and process chemistries.
Designed for high-flow, longer-lifetime filter applicatoins with weak acids, bases and ultrapure DI water
Designed for ultrapure gas system filtration.