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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

Substrate Handling

Wafer pods and cassettes for flat panel display handling applications

Entegris manufactures a number of wafer pods and cassettes that can be used to safely protect square or round flat panel display substrates during processing and transport. We can customize solutions to cost-effectively manage substrates for a variety of sizes and applications. Materials, capacities, automation and general specifications can all be designed to your specifications.