Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com or entegrisfuelcells.com)
Entegris manufactures a number of wafer pods and cassettes that can be used to safely protect square or round flat panel display substrates during processing and transport. We can customize solutions to cost-effectively manage substrates for a variety of sizes and applications. Materials, capacities, automation and general specifications can all be designed to your specifications.