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Material purity and the safe transport of wafers is the central value Entegris provides in the semiconductor fab. We purify, protect and transport the world’s semiconductor fab materials, including the array of liquids, air and gases contacting wafers of all sizes. Our customers turn to us to solve contamination and microenvironment challenges in all application areas.
Designed for the removal of gaseous contaminants down to part-per-trillion levels in continuous high-flow systems.
Ultra-clean fast-vent diffusers to particles and vent times in load lock and transfer chambers.
Designed for the removal of gaseous contaminants down to part-per-trillion levels with inorganic media.
Designed for point-of-use filtration in flat panel display manufacturing applications.
Designed for high-flow, longer-lifetime filter applicatoins with weak acids, bases and ultrapure DI water
Designed for ultrapure gas system filtration.