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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Thin Film Transistor (TFT)

Liquid and Gas Filters and Gas Diffusers for TFT processes in Flat Panel Display Applications

Developed from the Mykrolis® contamination control technologies, Entegris provides a broad portfolio of liquid and gas contamination control technologies for the flat panel display fab.

Liquid Filters for for TFT (thin film transistor) processes and chemistries, including: wet etching, detergent, DI cleaning, stripper, rework, photoresist coating, thinner, HMDS, developer, DI water and scrubbers.
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To find product information on Entegris fluid handling solutions, go to the Fluid Handling Product Catalog

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Filter Results: Your selection returned the following items within this category.

Panelgard™ Filters Designed for point-of-use filtration in flat panel display manufacturing applications.	Processgard® Filters Designed for prefiltration of DI Water and process chemistries.	Fluorogard® Filters PTFE membrane filter designed to efficiently remove particles from a broad range of acids, bases, solvents and other process chemicals.
Chemlock® Housings Designed for tool space saving and easy filter cartridge changeout.