Purity and process control in high-flow applications
WEC processes modify and clean the wafer surface with a critical influence towards meeting the demanding yield requirements of an effective fab. These processes utilize the most aggressive chemistries: strong acids, oxidizers, solvents, high temperatures and highly concentrated substances. The process materials and parameters must be controlled to levels other industries cannot achieve in terms of repeatability and consistency. Entegris provides the solutions to succeed under these extreme filtration and fluid handling conditions. We offer a complete line of PFA fluid handling components, including; valves, fittings, tubing and pipe in 1/4" to 2" sizes.
Fluid Handling Product Catalog Fittings Mobile Selection Tool