Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)
WEC processes modify and clean the wafer surface with a critical influence towards meeting the demanding yield requirements of an effective fab. These processes utilize the most aggressive chemistries: strong acids, oxidizers, solvents, high temperatures and highly concentrated substances. The process materials and parameters must be controlled to levels other industries cannot achieve in terms of repeatability and consistency. Entegris provides the solutions to succeed under these extreme filtration and fluid handling conditions. We offer a complete line of PFA fluid handling components, including; valves, fittings, tubing and pipe in 1/4" to 2" sizes.
Fluid Handling Product Catalog Fittings Mobile Selection Tool
Designed for tool space saving and easy filter cartridge changeout.
Valves, fittings, tubing and pipe designed for delivery of high-purity corrosive chemicals.
Designed for point-of-use filtration in flat panel display manufacturing applications.
Maximum heat transfer and uniform heat exhange in a safe, ultra-clean and compact design
Designed for high-flow, longer-lifetime filtration of weak acids, bases and ultrapure DI water
Designed for ultrapure gas system filtration.