Filtration, purification, storage and delivery of process chemicals gases and water
Chemicals used within the semiconductor industry are categorized as one the cleanest grade of chemicals made – microelectronic-grade. Getting these chemicals from their source of manufacture to point-of-use requires highly engineered containers and careful handling to maintain these important levels of cleanliness.
To find product information on Entegris fluid handling solutions, go to the Fluid Handling Product Catalog
FluoroPure® packaging solutions meet your compatibility, purity and regulatory requirements. HDPE or PFA composite drums and intermediate bulk containers are available. With increasing demands on chemical purity, Entegris continues to develop new solutions to reduce a fab's operating cost and improve the value of chemical products.
Entegris understands the industry need to maintain purity while storing valuable microelectronic-grade chemicals. FluoroPure® fluoropolymer blowmolded and rotomolded day tanks extend the benefits of storing chemicals in bulk and maximize operational efficiency.
As the leader in clean, safe fluoropolymer chemical container solutions, Entegris can also provide vessels customized to specifications. To assure against unsafe mixing and to minimize human exposure to chemical and fumes, the industry-standard Sentry™ Quick Connect System can be used to remove chemicals from the container.
Providing filtered liquids, gases and water to fab areas is the foundation of the BCDS (bulk chemical delivery) operation. Entegris provides solutions to the challenge of providing and maintaining purity in these materials with a variety of technologies.
With a wide range of optioins, Entegris gas purification systems and components are designed for the removal of gaseous contaminants down to part-per-trillion levels in continuous high-flow systems.