Regardless of the ion implant equipment or process chemistry, Entegris has a material solution for the components used along the beamline. Entegris’ family of materials provide the optimum performance/cost benefits for each area of the beamline.
Entegris’ POCO® graphite components are used across all generations and types of implant equipment. Typical applications are electrodes, high wear beam defining parts, structural shielding parts, structural extraction hardware, source area parts and analyzer magnet components.
All implant components are machined to customer prints or specifications. Design engineers are available to translate drawings into manufactured parts.