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Solaris SCR Filters

Point-of-Use CMP Filter
 
Solaris SCR Filters
  • Unique stacked bed media design allows precise filtration performance
  • Available as a 5” and 10” disposable filter
  • Available in 1.5 µm and 3.0 µm retention ratings
  • All polypropylene construction with melt-blown stacked bed depth filtration media
 
Solaris SCR Filters
Materials
Media: Wrapped melt-blown polypropylene

O-ring: Ethylene-Polypropylene Rubber (EPR)
Operating conditions
Maximum forward pressure: 50 PSI @ 20°C (68°F)

Chemical Mechanical Planarization (CMP) - specific to Solaris filters

Melt-blown graded density polypropylene filters for silica and alumina CMP slurries.  Designed for point-of-dispense applications in semiconductor and data storage applications.