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Fluorogard RS Filter Family

PTFE membrane filter for photoresist residue removal applications
 
Fluorogard RS Filter Family
  • High-capacity multiple layer, membrane optimized structure and layering technology
  • Available in cartridges and disposable filters. Disposables available with Flaretek®, Pillar® and Flowell® compatible fittings
  • Provides excellent gel and small particle retention in a single cartridge design
  • High-flow cartridge design with optimized membrane pleating
 
Fluorogard P-RS Pre-filters
Materials:
Membrane: nonwoven PTFE

Upstream/downstream supports and endcaps: PFA

Cartridge o-ring: TEE (Teflon® fluoropolymer encapsulated ethylene-propylene rubber)
Retention rating:
40 μm
Media area:
14000 cm2 (15.1 ft. 2)
Maximum operating conditions:
Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at 25°C

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSID) at 25°C

Maximum operating temperature: 150°C (302°F)
Fluorogard P-RS Disposable Pre-filters
Materials:
Membrane: nonwoven PTFE

Upstream/downstream supports and endcaps: PFA
Retention rating:
40 μm
Media area:
14000 cm2 (15.1 ft. 2)
Maximum operating conditions:
Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at 25°C

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSID) at 25°C

Maximum operating temperature: 150°C (302°F)
Fluorogard RS-M Cartridge Filters
Materials:
Filtration media: PTFE prefiltration media and optimized PTFE membrane

Upstream/downstream supports and endcaps: PFA

O-rings: TEE (Teflon® fluoropolymer encapsulated ethylene-propylene rubber)
Retention ratings:
0.2 μm, 0.1 μm, 0.05 μm
Media area:
6500 cm2 (14 ft.2)
Maximum operating conditions:
Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at25°C

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSID) at 25°C

Maximum operating temperature: 150°C (302°F)
Fluorogard RS-M Disposable Filters
Materials:
Filtration media: PTFE prefiltration media and optimized PTFE membrane

Upstream/downstream supports and endcaps: PFA
Retention ratings:
0.2 μm, 0.1 μm, 0.05 μm
Media area:
6500 cm2 (14 ft.2)
Maximum operating conditions:
Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at25°C

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSID) at 25°C

Maximum operating temperature: 150°C (302°F)
Fluorogard RS-T Cartridge Filters
Materials:
Filtration Media: Optimized PTFE

Upstream/downstream supports and endcaps: PFA

O-rings: TEE (Teflon® fluoropolymer encapsulated ethylene-propylene rubber)
Retention ratings:
0.2 μm, 0.1 μm, 0.05 μm
Media area:
13000 cm2 (14 ft2)
Maximum operating conditions:
Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at25°C

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSID) at 25°C

Maximum operating temperature: 150°C (302°F)
Fluorogard RS-T Disposable Filters
Materials:
Filtration media: Optimized PTFE

Upstream/downstream supports and endcaps: PFA
Retention ratings:
0.2 μm, 0.1 μm, 0.05 μm
Media area:
13000 cm2 (14 ft2)
Maximum operating conditions:
Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at25° C

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSID) at 25° C

Maximum operating temperature: 150° C (302° F)