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Wafergard III NF Mini In-line Gas Filters

Superior particulate filtration for ultrapure gas system filtration
 
Wafergard III NF Mini In-line Gas Filters
  • Cleanest, most efficient all-metal filters available
  • Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O3 and low-level hydride dopant gases.)
  • Ideal for high-temperature and dynamic-pressure applications
  • Typically used for flows up to 60 SLPM
 
Wafergard III NF Mini In-line Gas Filters
Materials:
Filter element: Patented, sintered nickel membrane filter.

Housing: Electropolished VAR 316L stainless steel housing

Surface finish interior: <=5 μin Ra

Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec.
Downstream cleanliness:
Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm
Particle retention:
Particle retention: Greater than 99.9999999% (9 LRV) removal of all particles at 60 SLPM (referenced at the most penetrating particle size)
Removal rating:
>=0.003 μm
Operating conditions:
Maximum inlet pressure: 165 bar (2400 PSI)@100°C

Maximum forward/reverse differential pressure: 20 bar (290 PSID)

Maximum operating temperature: Inert gases 400°C @ 83 bar (1200 PSI); Corrosive and reactive gases: 50°C@165 bar (2400 PSI)
Flow rating:
Refer to performance data
Warranty:
5 year
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