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Wafergard C2 1.125" C-Seal Surface Mount Sandwich Gas Filters

All-metal ultrapure filter dramatically reduces footprint
 
Wafergard C2 1.125" C-Seal Surface Mount Sandwich Gas Filters
  • Provides the industry’s best filter in a surface-mount design
  • Inlet feed through to device mounted above provides filtration/protection of returning gas to ensure cleanliness for downstream devices
  • Available with nickel or stainless membrane
 
Wafergard C2 1.125" C-Seal Surface Mount Sandwich Gas Filters
Materials:
Membrane:

Patented, sintered nickel membrane or stainless steel membrane

Housing base block:

316L double-melt stainless steel electropolished, SEMI F20

Surface finish, interior:

<5 μin Ra

Helium leak rating:

Qualified: 2 `10-10 cc/min. Tested: 1`10 -9 cc/min.
Performance:
Downstream cleanliness:

Particles: Less than 0.03 particles/Liter (<1 particle/ft3) greater than 0.01 m

Volatiles: Volatile outgassing of H2O, O2 and THC is below detectable limits (by RGA and FID at room temperature)

Particle retention: Greater than 99.9999999 (9 LRV) removal of all particles (referenced at the most penetrating particle size)

Removal rating: >0.003 μm
Operating conditions:
Maximum inlet pressure: 20.7 MPa (207 bar; 3000 PSIG)

Maximum forward/ reverse differential pressure: 0.86 MPa (8.6 bar; 125 PSID)

Maximum operating temperature:

Inert gases: 400°C (752°F) @ 35 bar (500 PSIG)

Corrosive and reactive gases: 50°C (122°F) @ 35 bar (500 PSIG)