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Wafergard MAX In-line Teflon® Gas Filters

Superior particulate filtration for ultrapure gas applications
 
Wafergard MAX In-line Teflon® Gas Filters
  • All Teflon® filter element provides the industry’s best performance for ultrapure applications
  • Excellent compatibility with all classes of semiconductor process gases as well as general nitrogen and CDA applications
  • Specifically designed for high flow and low delta pressure applications
  • For use with inert and reactive gases, including ozone
  • Pre-conditioned for fast startup (Silver only)
  • Select ultrahigh purity (Silver) or high purity (Bronze) surface finish
 
Wafergard MAX In-line Teflon® Gas Filters
Materials:Filter element: Hydrophobic Teflon® PTFE membrane supported by molded Teflon® PFA structures
Housing: Electropolished low sulfur 316L stainless housing
Surface finish interior: Bronze <=20 μin Ra; Silver <=7 μin Ra
Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec.
Downstream cleanliness:Particles: Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm
Volatiles (Silver) : <10 ppb H2O and O2. Below LDL THC (lower detection limit is 5 ppb)
Particle retention:Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size)
Removal rating:>=0.003 μm
Operating conditions:Maximum inlet pressure: Silver and Bronze 1⁄4" and 1⁄2" VCR® compatible fittings: 4.0 MPa (40 bar, 580 PSIG); Silver butt weld and Bronze 1⁄4" Swagelok® compatible fittings: 7.0 MPa (70 bar, 1015 PSIG); Bronze 1⁄2" and 3⁄8" Swagelok® compatible fittings: 7.5 MPa (75 bar, 1088 PSIG)
Maximum forward differential pressure: 7 bar (102 PSID)
Maximum operating temperature: 120°C (248°F)
Flow rating:Refer to performance data
Warranty:Bronze: 1 year
Silver: 3 years
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