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GateKeeper Hydride Gas Purifiers

Cost-effective, environmentally friendly gas purification
 
GateKeeper Hydride Gas Purifiers
  • Designed for use with NH3, AsH3, PH3, SiH 4, and GeH4. The purifiers remove O2, CO2, H2O and oxidation byproducts to sub-ppb (part-per-billion) levels.
  • Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required
  • Low pressure drop across purifiers
 
GateKeeper Hydride Gas Purifiers
Materials of construction:
316L stainless steel, electropolished 10 Ra
Media:
Inorganic
Gases purified:
NH3, AsH3, PH3, SiH 4, and GeH4
Outlet purity:
<1 ppb O2, CO2, H2O
Outlet particle filtration:
0.003 μm
Maximum differential pressure:
1379 kPa (200 PSID)
Minimum operating pressure:
101 kPa (14.7 PSIA)
Maximum flow rates:
See datasheet.
Leak rating:
1 × 10-9 atm cc/sec.
Maximum inlet challenge of H2O to maintain product efficiency:
10 ppm (part-per million)
Lifetime:
One year at nominal flow rate with 1 ppm inlet challenge of moisture
Maximum operating temperature:
65°C (149°F)