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QuickChange ATM Filters

Advanced nondewetting membrane technology in a high-flow, long-life prewet filter
 
QuickChange ATM Filters
  • Unique membrane prevents dewetting in air, during installation or chemical dumps/drains and outgassing chemistries
  • Nondewetting PTFE membrane filter, prewet and packaged in ultrapure DI water
  • Designed for use in any aqueous-based chemical
  • High membrane surface area
 
QuickChange ATM Filters
Materials:
Membrane: Prewet, nondewetting PTFE

Supports: PFA

O-rings: TEV, Chemraz® or Kalrez® perfluoroelastomers
Retention ratings:
0.03 μm, 0.05 μm and 0.1 μm
Membrane area:
18,000 cm2 (19.4 ft2)
Maximum operating conditions:
Maximum forward differential pressure: 0.44 MPa (4.41 bar; 64 PSID) at 25°C; 0.05 MPa (0.51 bar; 7.5 PSID) at 180°C

Maximum reverse differential pressure: 0.35 MPa (3.5 bar; 50 PSID) at 25°C

Maximum operating temperature: 180°C (at the above conditions)
Compatibility:
Entegris recommends QuickChange filters for use with aqueous-based chemicals at ambient temperatures (including H2SO4, H2PO4, HNO3, HF, HCl, BOE, NH4F, H2O2, TMAH, NH4OH and ozonated water) and elevated temperature applications (including SC1, SC2, piranha etch and metal etch).
Metallic cxtractables:
Guaranteed levels to <25 μg/device (17 ppb in 1.5L 10% HCl)
QuickChange ATM Disposable Filters
Materials:
Membrane: Prewet, nondewetting PTFE

Supports and shell: PFA
Retention ratings:
0.03 μm, 0.05 μm and 0.1 μm
Membrane area:
18,000 cm2 (19.4 ft2)
Maximum operating conditions:
Maximum forward differential pressure: 0.44 MPa (4.41 bar; 64 PSID) at 25°C; 0.05 MPa (0.51 bar; 7.5 PSID) at 180°C

Maximum reverse differential pressure: 0.35 MPa (3.5 bar; 50 PSID) at 25°C

Maximum operating temperature: 180°C (at the above conditions)
Compatibility:
Entegris recommends QuickChange filters for use with aqueous-based chemicals at ambient temperatures (including H2SO4, H2PO4, HNO3, HF, HCl, BOE, NH4F, H2O2, TMAH, NH4OH and ozonated water) and elevated temperature applications (including SC1, SC2, piranha etch and metal etch).
Metallic cxtractables:
Guaranteed levels to <10 μg/device (7 ppb in 1.5L 10% HCl)
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