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Impact® Asymmetric Disposable Filters

Rapid changeout UPE membrane filters for point-of-use photochemical filtration, including photoresists and solvents. Available in 5 nm and 10 nm retention ratings

Data Sheet (860915)

Larger Image

Available in 5 nm retention rating - tightest membrane technology to meet critical line-width processes
Design optimized for use with the Impact® manifold and IntelliGen® dispense systems; extremely clean for metal ions and extractables
Minimal chemical exposure, rapid connection design, allows quick filter installation and minimizes downtime while limiting the handling of hazardous chemicals during the installation and disposal processes, thereby promoting a more healthy workplace
Small footprint allows installation of more filters on tools for advanced systems
Low holdup volume minimizes chemical waste
New pleating technology: Impact V2 5 nm and 10 nm products incorporate more membrane within the same 0.03 μm and 0.05 μm Impact V2 filters, providing the footprint and benefits of ultra fine retention without a flow or pressure drop penalty
Proprietary cleaning technology ensures low metals and organic extractables, eliminating another variable to the customer’s process

Impact® Asymmetric Disposable Filters

Materials:	Membrane: Asymmetric ultra-high molecular-weight polyethylene (UHMWPE)
	Supports: (upstream, downstream and mold): High-density polyethylene (HDPE)
	O-ring: Kalrez® perfluoroelastomer
Manifold Fittings:	6.35 mm Flowell® 60 Type
	5 mm/3 mm Flowell 60 Type
	6 mm/4 mm Flowell 60 Type
	4 mm/3 mm Flowell 60 Type
	6.35 mm Super Type Pillar®
Maximum operating conditions:	Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) @ 25°C (77°F)
	Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSI) @ 25°C (77°F)
	Maximum operating temperature: 40°C (104°F)
Membrane area:	1,300 cm² (1.4 ft²)
Holdup volume:	<=55 cc
Compatibility:	PGMEA, PGME, NMP, ethyl lactate, MMP, and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.
Wettability:	Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, ECA, NMP and other photochemical solvents

Ordering Information

Part Number	Description	Membrane/ Media/M.O.C.*	Retention Rating	Connection	Size	O-Ring
A2AY000K1	Impact® 2 OF Disposable Photochemical Filter	UPE	0.03	N/A		Kalrez®
A2AZ000E1	Impact® 2 OF Disposable Photochemical Filter	UPE	0.05	N/A		EPDM
A2AZ000K1	Impact® 2 OF Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
A2AV000K1	Impact® 2 OF Disposable Photochemical Filter	UPE	0.10	N/A		Kalrez®
A2AG000K1	Impact® 2 OF Disposable Photochemical Filter	UPE	0.20	N/A		Kalrez®
A2AX000K1	Impact® 2 OF Disposable Photochemical Filter	UPE	0.02	N/A		Kalrez®
A2BZ000K1	Impact® 2 OF Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
A2UH000K1	Impact® 2 OF Disposable Photochemical Filter	UPE	0.50	N/A		Kalrez®
A2AT00MK1	Impact® 2 OF Disposable Photochemical Filter	UPE	0.01	N/A		Kalrez®
SH5M116Y04	Impact® 2 OF Disposable Photochemical Filter	UPE	0.10	N/A		Kalrez®
A2MX44401	Impact® 2 OF Manifold	N/A		N/A		N/A
A2MX000K1	Impact® 2 OM PCM Disposable Photochemical Filter	UPE	0.02	N/A		Kalrez®
A2MZ000K1	Impact® 2 OF PCM Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
A212200K1	Impact® 2 OF PCM Disposable Photochemical Filter	UPE	1.20	N/A		Kalrez®
A2AY00001	Impact® 2 OM PCM Disposable Photochemical Filter	UPE	0.03	N/A
A2AZ00001	Impact® 2 OM PCM Disposable Photochemical Filter	UPE	0.05	N/A
A2AV00001	Impact® 2 OM PCM Disposable Photochemical Filter	UPE	0.10	N/A
A2AG00001	Impact® 2 OM PCM Disposable Photochemical Filter	UPE	0.20	N/A
A2AX00001	Impact® 2 OM PCM Disposable Photochemical Filter	UPE	0.02	N/A
A2BZ00001	Impact® 2 OM PCM Disposable Photochemical Filter	UPE	0.05	N/A
A2AT00M01	Impact® 2 OM PCM Disposable Photochemical Filter	UPE	0.01	N/A
A2MX222KT	Impact® 2 OM PCM Disposable Photochemical Filter	UPE		1/4" Flowell™ 60 KL
A2MX00001	Impact® 2 OM PCM Disposable Photochemical Filter	UPE	0.02	N/A
A2MZ00001	Impact® 2 OM PCM Disposable Photochemical Filter	UPE	0.05	N/A
A2AZ200E1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.05	N/A		EPDM
A2AZ200K1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
A2AZ20001	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.05	N/A
A2AV200K1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.10	N/A		Kalrez®
A2AV20001	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.10	N/A
A2AG200K1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.20	N/A		Kalrez®
A2AG20001	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.20	N/A
A2UA200K1	Impact® 2 V2 Disposable Photochemical Filter	UPE	1.00	N/A		Kalrez®
A2AT20ME1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.01	N/A		EPDM
A2AT20MK1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.01	N/A		Kalrez®
A2AT20M01	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.02	N/A
A2AX20ME1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.02	N/A		EPDM
A2AX20MK1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.02	N/A		Kalrez®
A2AX20M01	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.02	N/A
A2ST20MK1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.01	N/A		Kalrez®
A2ST20M01	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.01	N/A
A2SF20MK1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
A2SF20M01	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.05	N/A
S4418M004Y09	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.50	N/A
A2NT200K1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.01	N/A		Kalrez®
A2NT20001	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.01	N/A
A2NX200K1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.02	N/A		Kalrez®
A2NX20001	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.02	N/A
A2MX20MK1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.02	N/A		Kalrez®
A2MX20M01	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.02	N/A
A2MZ200K1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
A2MZ20001	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.05	N/A
A2AZ2LMK1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
A2AX2LMK1	Impact® 2 V2 Disposable Photochemical Filter	UPE	0.02	N/A		Kalrez®
A2DT200K1	Impact® 2-DUO Disposable Photochemical Filter	Composite	0.01	N/A		Kalrez®
A2DT20001	Impact® 2-DUO Disposable Photochemical Filter	Composite	0.01	N/A
A2DY200K1	Impact® 2-DUO Disposable Photochemical Filter	Composite	0.00	N/A		Kalrez®
A2DY20001	Impact® 2-DUO Disposable Photochemical Filter	Composite	0.00	N/A
AMAZ200K1	Impact® Mini DisposablePhotochemical Filter	UPE	0.05	N/A		Kalrez®
AMAV200K1	Impact® Mini DisposablePhotochemical Filter	UPE	0.10	N/A		Kalrez®
AMAX200K1	Impact® Mini DisposablePhotochemical Filter	UPE	0.02	N/A		Kalrez®
AMST200K1	Impact® Mini DisposablePhotochemical Filter	UPE	0.01	N/A		Kalrez®
AMSF200K1	Impact® Mini DisposablePhotochemical Filter	UPE	0.05	N/A		Kalrez®
F1S9E0136	Impact® Mini DisposablePhotochemical Filter	UPE	0.05	N/A		Kalrez®
F0S7E0134	Impact® Mini DisposablePhotochemical Filter	UPE	0.01	N/A
ENITND024	Impact® OF Manifold	N/A		N/A		N/A
AWMZP0001	Impact® Plus OM PCM Disposable Photochemical Filter	UPE	0.05	N/A
SH5R149B05	Impact® Plus Disposable Photochemical Filter	UPE	0.50
AWAZP00K1	Impact® Plus OF Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
AWAVP00K1	Impact® Plus OF Disposable Photochemical Filter	UPE	0.10			Kalrez®
AWAXP00K1	Impact® Plus OF Disposable Photochemical Filter	UPE	0.02			Kalrez®
AWMXP00K1	Impact® Plus OF Disposable Photochemical Filter	UPE	0.02			Kalrez®
AWMZP00K1	Impact® Plus OF Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
AWAYP0001	Impact® Plus OM Disposable Photochemical Filter	UPE	0.03
AWAZP0001	Impact® Plus OM Disposable Photochemical Filter	UPE	0.05	N/A
AWAVP0001	Impact® Plus OM Disposable Photochemical Filter	UPE	0.10
AWAGP0001	Impact® Plus OM Disposable Photochemical Filter	UPE	0.20
SH5R156B05	Impact® Plus OM Disposable Photochemical Filter	UPE	1.00
AWAXP0001	Impact® Plus OM Disposable Photochemical Filter	UPE	0.02
AWATP0M01	Impact® Plus OM Disposable Photochemical Filter	UPE	0.01
AWMXP0001	Impact® Plus OM Disposable Photochemical Filter	UPE	0.02
AP2520001	Impact® Plus OM Disposable Photochemical Filter	UPE	2.50
AW06P0001	Impact® Plus OM Disposable Photochemical Filter	UPE	0.60
APAZ200K1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
APAZ20001	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.05	N/A
APAV200K1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.10			Kalrez®
APAV20001	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.10
APAG200K1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.20			Kalrez®
APAG20001	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.20
APUA200K1	Impact® Plus V2 Disposable Photochemical Filter	UPE	1.00			Kalrez®
APUA20001	Impact® Plus V2 Disposable Photochemical Filter	UPE	1.00
APAT20MK1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.01			Kalrez®
APAT20M01	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.01
APAX20MK1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.02			Kalrez®
APAX20M01	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.02
APST20MK1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.01			Kalrez®
APST20M01	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.01
APSF20MK1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.05			Kalrez®
APSF20M01	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.05
APNZ200K1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
APNT200K1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.01			Kalrez®
APNX200K1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.02			Kalrez®
APNZ20001	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.05	N/A
APNT20001	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.01
APNX20001	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.02
APMX20MK1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.02			Kalrez®
APMX20M01	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.02
APMZ200K1	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.05	N/A		Kalrez®
APMZ20001	Impact® Plus V2 Disposable Photochemical Filter	UPE	0.05	N/A
APDT200K1	Impact® Plus-Duo Disposable Photochemical Filter	Composite	0.01			Kalrez®
APDT20001	Impact® Plus-Duo Disposable Photochemical Filter	Composite	0.01
APDY200K1	Impact® Plus-Duo Disposable Photochemical Filter	Composite	0.00			Kalrez®
APDY20001	Impact® Plus-Duo Disposable Photochemical Filter	Composite	0.00
DZUM044C1	Impact® ST Manifold	N/A		N/A		N/A
DZUMC4401	Impact® ST Manifold Adapter Kit	N/A		N/A		N/A

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