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Planargard CS Bulk Cartridge Filters

Designed to meet the needs of next generation copper and ILD slurries

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Nonwoven depth media design enables filter to retain defect-causing agglomerates with high efficiency
Excellent retention of agglomerates while allowing consistent, desired “working” slurry particles to reach the wafer surface
Depth filter greatly reduces the potential for premature filter ‘plugging’
Available in .0.2 µm , 0.3µm, 0.5 µm, 0.7 µm, 1.0 µm retention ratings
Available as a filter cartridge in 5”, 10”, 20” and 30” lengths
Designed to work with Chemlock® housings

Planargard CS Bulk Cartridge Filters

Materials:	Filter element: All polypropylene construction
	O-ring: EPR
Connection:	Code 0, 2-222
Maximum operating conditions:	Maximum forward differential pressure: 0.48 MPa (4.8 bar, 70 PSI) at 25°C