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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com or entegrisfuelcells.com)

Guardian™ ECD Cartridge Filters

Hydrophilic, high-flow inert membrane with excellent flow/retention properties, ideal solution for wet cleans and CuECD

Data Sheet (400188)

Application Note (591505)

Larger Image

Provide excellent chemical compatibility, downstream chemical cleanliness, reduced system startup times and long lifetime
Highly hydrophilic surfaces reduce the potential for microbubble formation
High-flow asymmetric membrane delivers excellent performance while minimizing system pressure drop
Non-interactive surfaces will not react with typical plating additives and related process chemistries – ensures ultimate process protection

Guardian™ ECD Cartridge Filters

Materials:	Membrane: Hydrophilic polyethersulfone (PES)
	Supports, core and sleeve: High-density polyethylene (HDPE)
	O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer o-ring (TEV)
Connections:	Code 0 (2-222)
Membrane area:	10000 cm² (10.76 ft²)
Maximum operating conditions:	Maximum forward/reverse differential pressure:0.34 MPa (3.4 bar; 49 PSID) at 25°C (77°F)
	Maximum operating temperature: 60°C (140°F)
Compatibility:	Optimized for electrochemical deposition processes

Ordering Information

Part Number	Description	Membrane/ Media/M.O.C.*	Retention Rating	Connection	Size	O-Ring
CW0H010T1	Fluorogard® RST Liquid Cartridge Filter	PTFE	0.20	N/A	10	Code 0 TEV®
GDCZ01TPE	Guardian® AT Liquid Cartridge Filter	UPE	0.05	N/A	10	Code 0 TEV®
GDCV01TPE	Guardian® AT Liquid Cartridge Filter	UPE	0.10	N/A	10	Code 0 TEV®
GDCG01TK1	Guardian® AT Liquid Cartridge Filter	UPE	0.20	N/A	10	Code 0 Kalrez®
GDCG01TPE	Guardian® AT Liquid Cartridge Filter	UPE	0.20	N/A	10	Code 0 TEV®
GDCZ01TPEK	Guardian® AT Liquid Cartridge Filter	UPE	0.05	N/A	10	Code 0 TEV®
GDCV01TPEK	Guardian® AT Liquid Cartridge Filter	UPE	0.10	N/A	10	Code 0 TEV®
GDCG01TPEK	Guardian® AT Liquid Cartridge Filter	UPE	0.20	N/A	10	Code 0 TEV®
GDCY01P01	Guardian® ATX Liquid Cartridge Filter	UPE	0.03	N/A	10	Code 0 TEV®
GDCZ01PK1	Guardian® ATX Liquid Cartridge Filter	UPE	0.05	N/A	10	Code 0 Kalrez®
GDCZ01P01	Guardian® ATX Liquid Cartridge Filter	UPE	0.05	N/A	10	Code 0 TEV®
GDCZ0SP01	Guardian® ATX Liquid Cartridge Filter	UPE	0.05	N/A	4	Code 0 TEV®
GDCV01PK1	Guardian® ATX Liquid Cartridge Filter	UPE	0.10	N/A	10	Code 0 Kalrez®
GDCV01P01	Guardian® ATX Liquid Cartridge Filter	UPE	0.10	N/A	10	Code 0 TEV®
GDCV02P01	Guardian® ATX Liquid Cartridge Filter	UPE	0.10	N/A	20	Code 0 TEV®
GDCV0SP01	Guardian® ATX Liquid Cartridge Filter	UPE	0.10	N/A	4	Code 0 TEV®
GDCG01PK1	Guardian® ATX Liquid Cartridge Filter	UPE	0.20	N/A	10	Code 0 Kalrez®
GDCG01P01	Guardian® ATX Liquid Cartridge Filter	UPE	0.20	N/A	10	Code 0 TEV®
GDCG0SP01	Guardian® ATX Liquid Cartridge Filter	UPE	0.20	N/A	4	Code 0 TEV®
GDDZATXST	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.05	3/4" S Tube	10	N/A
GDDZATXTP	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.05	3/4' T-Tube Pillar®	10	N/A
GDDZATXTT	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.05	3/4" T-Tube Pillar®	10	N/A
GDDVATXST	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.10	3/4" S Tube	10	N/A
GDDVATXTP	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.10	3/4' T-Tube Pillar®	10	N/A
GDDVATXTT	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.10	3/4" T-Tube Pillar®	10	N/A
GDDVATSST	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.10	3/4" S Tube	4	N/A
GDDVATSTH	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.10	3/4' T-Tube Pillar®	4	N/A
GDDGATXST	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.20	3/4" S Tube	10	N/A
GDDGATXTH	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.20	3/4' T-Tube Pillar®	10	N/A
GDDGATSST	Guardian® ATX Chem-Line® II Disposable Liquid Filter	UPE	0.20	3/4" S Tube	4	N/A
GDDZATX0F	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.05	3/4" Flaretek®	10	N/A
GDDZATX1F	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.05	3/8" Flaretek®	10	N/A
GDDVATX4F	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.10	1" Flaretek®	10	N/A
GDDVATX0F	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.10	3/4" Flaretek®	10	N/A
GDDGATX0F	Guardian® ATX Chem-Line® I Disposable Liquid Filter	UPE	0.20	3/4" Flaretek®	10	N/A
GDCZ01PK1K	Guardian® ATX Liquid Cartridge Filter	UPE	0.05	N/A	10	Code 0 Kalrez®
GDCZ01P01K	Guardian® ATX Liquid Cartridge Filter	UPE	0.05	N/A	10	Code 0 TEV®
GDCV01PK1K	Guardian® ATX Liquid Cartridge Filter	UPE	0.10	N/A	10	Code 0 Kalrez®
GDCV01P01K	Guardian® ATX Liquid Cartridge Filter	UPE	0.10	N/A	10	Code 0 TEV®
GDCG01P01K	Guardian® ATX Liquid Cartridge Filter	UPE	0.20	N/A	10	Code 0 TEV®
CHUZ03PLT	Guardian® DEV HP Liquid Cartridge Filter	UPE	0.05	N/A	30	Code 0 TEV®
CHUZ01PLE	Guardian® DEV Liquid Cartridge Filter	UPE	0.05	N/A	10	Code 0 EPR
CHUZ01PLK	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.05	N/A	10	Code 0 Kalrez®
CHUZ01PLT	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.05	N/A	10	Code 0 TEV®
CHUZ02PLE	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.05	N/A	20	Code 0 EPR
CHUZ02PLT	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.05	N/A	20	Code 0 TEV®
CHUZ03PLE	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.05	N/A	30	Code 0 EPR
CHUV01PLE	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	10	Code 0 EPR
CHUV01PLK	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	10	Code 0 Kalrez®
CHUV01PLT	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	10	Code 0 TEV®
CHUV02PLE	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	20	Code 0 EPR
CHUV02PLT	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	20	Code 0 TEV®
CHUV03PLE	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	30	Code 0 EPR
CHUV03PLT	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	30	Code 0 TEV®
CHUZ01PLEK	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.05	N/A	10	Code 0 EPR
CHUZ01PLKK	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.05	N/A	10	Code 0
CHUZ01PLTK	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.05	N/A	10	Code 0 TEV®
CHUZ02PLTK	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.05	N/A	20	Code 0 TEV®
CHUV01PLTK	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	10	Code 0 TEV®
CHUV02PLTK	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	20	Code 0 TEV®
CHUV01PLEK	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	10	Code 0 EPR
CHUV01PLKK	Guardian® DEV HP 0.05UM 10" CODE 0 KALR	UPE	0.10	N/A	10	Code 0
GDDZDEV0F	Guardian® DEV HPX Chem-Line® Disposable Liquid Filter	UPE	0.05	3/4" Flaretek®
GDDZDEV1F	Guardian® DEV HPX Chem-Line® Disposable Liquid Filter	UPE	0.05	3/8" Flaretek®
GDDVDEV2F	Guardian® DEV HPX Chem-Line® Disposable Liquid Filter	UPE	0.10	1/2" Flaretek®
GDDVDEV0F	Guardian® DEV HPX Chem-Line® Disposable Liquid Filter	UPE	0.10	3/4" Flaretek®
GDDVDEV1F	Guardian® DEV HPX Chem-Line® Disposable Liquid Filter	UPE	0.10	3/8" Flaretek®
ECDY01M01	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	10	Code 0 E-FKM
ECDY01M01K	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	10	Code 0 E-FKM
ECDY01M01KSL	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	10	Code 0 E-FKM
ECDY01MK1	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	10
ECDY01MK1K	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	10
ECDY02M01	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	20	Code 0 E-FKM
ECDY02M01SL	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	20	Code 0 E-FKM
ECDY02M01K	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	20	Code 0 E-FKM
ECDY02MK1	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	20
ECDY02MK1K	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	20
ECDY0SM01	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	4	Code 0 E-FKM
ECDY0SMK1	Guardian® ECD PEM Liquid Filter Cartridge	UPE	0.03	N/A	4
ECDZ01P01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	10	Code 0 E-FKM
ECDZ01P01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	10	Code 0 E-FKM
ECDZ01PK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	10
ECDZ01PK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	10
ECDZ02P01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	20	Code 0 E-FKM
ECDZ02P01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	20	Code 0 E-FKM
ECDZ02PK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	20
ECDZ02PK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	20
ECDZ0SP01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	4	Code 0 E-FKM
ECDZ0SP01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	4	Code 0 E-FKM
ECDZ0SPK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	4
ECDZ0SPK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.05	N/A	4
ECDV01P01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	10	Code 0 E-FKM
ECDV01P01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	10	Code 0 E-FKM
ECDV01PK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	10
ECDV01PK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	10
ECDV02P01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	20	Code 0 E-FKM
ECDV02P01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	20	Code 0 E-FKM
ECDV02PK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	20
ECDV02PK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	20
ECDV0SP01	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	4	Code 0 E-FKM
ECDV0SP01K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	4	Code 0 E-FKM
ECDV0SPK1	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	4
ECDV0SPK1K	Guardian® ECD PEX Liquid Filter Cartridge	UPE	0.10	N/A	4
GUCZ01M01	Guardian® Plus HPM Liquid Filter Cartridge	UPE	0.50	N/A	10	Code 0 TEV®
GUCZ01MT1	Guardian® Plus HPM Liquid Filter Cartridge	UPE	0.05	N/A	10	Code 0 TEV®
GUCZ02M01	Guardian® Plus HPM Liquid Filter Cartridge	UPE	0.05	N/A	20	Code 0 TEV®
GUCZ02MT1	Guardian® Plus HPM Liquid Filter Cartridge	UPE	0.05	N/A	20	Code 0 TEV®
GUCZ03MT1	Guardian® Plus HPM Liquid Filter Cartridge	UPE	0.05	N/A	30	Code 0 TEV®
GUCV01MT1	Guardian® Plus HPM Liquid Filter Cartridge	UPE	0.10	N/A	10	Code 0 TEV®
GUCV01M01	Guardian® Plus HPM Liquid Filter Cartridge	UPE	0.10	N/A	10	Code 0 TEV®
GUCV02M01	Guardian® Plus HPM Liquid Filter Cartridge	UPE	0.10	N/A	20	Code 0 TEV®
GUCV02MT1	Guardian® Plus HPM Liquid Filter Cartridge	UPE	0.10	N/A	20	Code 0 TEV®
GDDZDEV4F	Guardian® DEV Liquid Filter Cartridge	UPE	0.05	N/A	10
GDDZDEV2F	Guardian® DEV Liquid Filter Cartridge	UPE	0.05	N/A	10
GDDVDEV4F	Guardian® DEV Liquid Filter Cartridge	UPE	0.10	N/A	10

How to Order From Entegris

Region	Telephone	Fax
North America	800-394-4083	800-763-5820
Germany	+49 (0) 351 79597-0	+49 (0) 351 79597-499
France	+33 4 76 35 73 50	+33 4 76 35 73 80
United Kingdom	+33 4 76 35 73 54	+33 4 76 35 73 80
Italy	+33 4 76 35 73 52	+33 4 76 35 73 80
India	+91 (0) 80 41 66 9660	+91 (0) 80 41 66 9661
Israel	+972 (0) 73 2210 000	+972 (0) 73 2210 022
Japan	+81-3-5442-9718	+81-3-5442-9738
Malaysia	+60-4-4274200	+60-4-6413294
Korea	+82-31-738-5300	+82-31-738-5305
Taiwan	+886-3-5710178	+886-3-5729520
Singapore	+65-6745-2422	+65-6745-4477
China	+86-21-28986710	+86-21-5080-5598