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Chambergard BGN Fast Vent Diffusers

High-volume throughput and rapid venting to atmosphere
 
Chambergard BGN Fast Vent Diffusers
  • Rapid vent, gentle flow to atmosphere increases system throughput by minimizing load lock vent cycle time
  • Provides rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber
  • Patented, sintered nickel technology in a compact diffuser unit for excellent particle retention
  • Easy installation/retrofit into existing tools with minimal downtime
 
Chambergard BGN Fast Vent Diffusers
Connections:Connection fitting types: Inlet Gasket Seal (VCR® compatible) or butt weld. Outlet - ISO NW bulkhead mounting compatible vacuum flange (compatible with standard ISO Quick Fitting, KF or QF, bulkhead clamps), or none (flangeless)
Inlet/outlet: See ordering information
Materials:Diffuser element: Patented, sintered nickel membrane filter
O-ring: Fluorocarbon
Housing: 316L stainless steel
Surface finish internal: <=32 μin Ra
Performance:Downstream cleanliness: Less than 0.003 particles/liter (<1 particle/ft3) greater than 0.01 μm
Removal rating: >=0.003 μm
Reliability: 100,000 cycle reliability at maximum rated inlet pressure at 25°C (77°F)
Operating conditions:Maximum inlet pressure with outlet to vacuum: 4 bar (60 PSID)
Maximum differential pressure: 5 bar (75 PSID)
Maximum operating temperature: 100°C (212°F)
Warranty:5 year or 100,000 cycles