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Chambergard Fast Vent Diffusers

Dramatically reduces particles and vent times in load lock and transfer chambers
 
Chambergard Fast Vent Diffusers
  • Increase system throughput by minimizing load lock vent cycle time
  • Provides rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber
  • Combines flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput
 
Chambergard Fast Vent Diffusers
Materials:Diffuser element: Patented, sintered nickel membrane filter
Housing: 316L stainless steel
Surface finish internal: <=32 μin Ra
Performance:Downstream cleanliness: Cleanliness less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm at rated flow
Removal rating: >=0.003 μm
Reliability: 100,000 cycle reliability at maximum rated inlet pressure at 25°C (77°F)
Connections:Refer to datasheet and ordering information
Operating conditions:Refer to datasheet