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Enkiro CF Filters

Ultrapure water filter for immersion lithography applications

Hydrophilic, surface modified UPE membrane spontaneously wets in water, eliminating prewetting requirements
20 nm retention rating filters provide excellent small particle retention
Large membrane area delivers ultrapure water to the point-of-use rapidly and efficiently
Available in 10" and 20" cartridge lengths

Enkiro CF Filters

Materials:	Membrane: Surface Modified UPE
	Support: High Density Polyethylene (HDPE)
	Core/Sleeve : High Density Polyethylene (HDPE)
	O-Rings : Teflon® fluoropolymer encapsulated Viton® fluoroelastomer o-ring (TEV)
Connections:	O rings: Code 0 (2-222) double o-rings
Dimensions (nominal):	Length: 247.5 mm (10”)
	Diameter: 83 mm
Membrane area:	1.1 m² (11.84 ft²)