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GateKeeper Corrosive Gas Purifiers

Cost-effective gas purification
 
  • Consistently delivers ultrapure gas
  • Designed for use with HCl, Cl2, HBr, BCl3, SiCl4 and SiF4. The purifiers remove moisture to <1 ppb (part-per-billion) in N2.
  • Guards against bulk gas purifier breakthrough, impurity spikes from liquid storage tanks, cylinder changeouts and unexpected contaminants in the process
  • Does not release hydrocarbons that may contaminate the process
  • Uses ambient temperature purification technology – no power or heat required
  • Low pressure drop across purifiers
 
GateKeeper Corrosive Gas Purifiers
Materials of construction:316L stainless steel, electropolished 10 Ra
Media:Inorganic
Gases purified:HCl, Cl2, HBr, BCl3, SiCl4, SiF4
Outlet purity:<1 ppb H2O in N2
Outlet particle filtration:0.003 μm
Maximum differential pressure:1379 kPa (200 PSID)
Minimum operating pressure:101 kPa (14.7 PSIA)
Maximum flow rates:See datasheet.
Leak rating:1 × 10-9 atm cc/sec.
Maximum inlet challenge of H2O to maintain product efficiency:10 ppm (part-per million)
Lifetime:One year at nominal flow rate with 1 ppm inlet challenge of moisture
Maximum operating temperature:65°C (149°F)