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Impact® Plus Filter

Point-of-use filter for photochemicals, including photoresists and solvents
Application Note (181860)
 
Impact® Plus Filter
  • Ultra-high molecular weight polyethylene (UPE) membrane technology
  • Rapid filter change-out design
  • Low hold-up volume limits chemical waste
  • Designed for use with the Impact® ST manifold and IntelliGen® Mini dispense system
 
Impact Plus Duo Filters - UPE Seiving and Polyamide Nonseiving Membrane Layers
Materials:
 Seiving membrane: Ultra-high molecular weight polyethylene (UPE)

Nonsieving layer: Polyamide

Supports: PE (upstream and downstream)

Molding: HDPE

Manifold/fittings: With Impact ST manifold
Dimensions:
 Heighht: 90 mm (3.54")

Width: 71.9 mm (2.83")

Depth: 95.5 mm (3.76"")
Maximum Operating Conditions:
 Maximum inlet pressure: 0.34 Mpa (3.4 bar, 50 PSI) @ 25°C

Maximum forward/reverse differntial pressure: 0.27 MPa (2.7 bar, 50 PSI) @ 25°C

Maximum operating temperature: 40°C (104°F)
Hold up volume:
 <55 cc
Compatibility:
 PGMEA, PGME, NMP, ethyl lactate, MMP, and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons
Wettability:
 Spontaneously wets in butyl acetate, PGMEA, PGME, ethyl lactate, MMP, ECA and other photochemical solvents
Impact® Plus Filter
Materials:
 Ultra-high molecular-weight polyethylene (UPE)

Supports and molded components: High-density polyethylene (HDPE)
Dimensions:
 Height: 90 mm (3.54")

Width: 71.9 mm (2.83")

Depth: 95.5 mm (3.76")
Maximum operating conditions:
 Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) @ 25°C (77°F)

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSI) @ 25°C (77°F)

Maximum operating temperature: 40°C (104°F)
Membrane Area:
 0.01 µm 1390 cm2 (1.5 ft2)

0.02 µm 1300 cm2 (1.4 ft2)

All others 1000 cm2 (1.08 ft2)
Holdup volume:
 <55 cc
Flow rate @1cPs 0.059 MPa
(0.59 bar, 8.53 PSI)
 0.01 µm >10 cc/sec.
(0.59 bar, 8.53 PSI)
 0.02 µm >10 cc/sec.

0.03 µm >8.33 cc/sec.

0.05 µm >13.33 cc/sec.

0.10 µm >18.33 cc/sec.
Compatibility:
 PGMEA, PGME, NMP, ethyl lactate, MMP and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.
Wettability:
 Spontaneously wets in butyl acetate, PGMEA, ethyl lactate, MMP, ECA, NMP and other photochemical solvents
  • Rapid filter changeout with minimal dripping: no tools and no draining required
  • Compact design provides easy installation or retrofit into existing tools
Impact® Plus PCM Filter - Ultraclean Membrane
Materials:
 Membrane: Hydrophilic ultra-high molecular weight polyethylene (UPE)
Supports and molded components:
 High-density Polyethylene (HDPE)
Maximum operating conditions:
 Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) @ 25°C

Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSI) @ 25°C

Maximum operating temperature: 40°C
Maximum operating temperature:
 40°C
Retention rating:
 0.02 μm and 0.05 μm
Membrane area:
 1,300 cm2 (1.4 ft2)
Compatibility:
 PGMEA, PGME, NMP, Ethyl lactate, MMP, and cyclohexanone. Not recommended for use with photochemicals containing aromatic hydrocarbons.
Wettability:
 Water and other photochemical solvents


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