header top curve
Home   >   Industries   >   Semiconductor   >   Photolithography   >   Impact® Filters   >   Impact® ST Manifold

Industries

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Impact ST Manifold

For use with Impact Plus disposable filters
 
Impact ST Manifold
  • Rapid filter changeout with minimal dripping: no tools and no draining required
  • Compact design provides easy installation or retrofit into existing tools
 
Impact ST Manifold
Materials:Internal wetted surface: PFA
Nonwetted surface: Stainless Steel
Fittings:1/4” Flaretek®
Depth: 101.6 mm (4.0”)
Dimensions:Height (manifold and fitting): 76 mm (2.99”)
O-rings: Kalrez® perfluoroelastomers
Width: 84 mm (3.3”)