header top curve
Home   >   Industries   >   Semiconductor   >   Photolithography   >   Microgard™ Filters   >   Microgard™ PI Cartridge Filters

Industries

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Microgard PI Cartridge Filters

Optimized hydrophobic UPE filters for polyimide and viscous chemicals with proven cleanliness and durability
 
  • Optimized for filtration of polyimide and other high-viscosity chemicals
  • Additional downstream supports ensure ultimate durability in the most demanding applications
  • Hydrophobic, patented UPE membrane
  • All polyethylene construction lowers metallic/ionic contamination that can leach from polypropylene and nylon filters
 
Microgard PI Cartridge Filters
Materials:Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE)
Supports, core and sleeve: High-density polyethylene (HDPE)
O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer (TEV) O-rings
Connections:Code 0 (2-222)
Membrane area:0.2 μm: 8,800 cm2 (9.47 ft2)
0.5 μm: 8,000 cm2 (8.6 ft2)
Maximum operating conditions:Maximum inlet pressure: 0.39 MPa (3.9 bar, 56.6 PSID) at 25°C
Maximum forward differential pressure: 0.39 MPa (3.9 bar, 56.6 PSID) at 25°C
Maximum reverse differential pressure: 0.255 MPa (2.55 bar, 39.3 PSID) at 25°C
Maximum operating temperature: 60°C (140°F)
Retention efficiency:0.2 μm: >99.999% retention of 0.198 μm PSL beads
0.5 μm: >99.999% retention of 0.55 μm PSL beads