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Wafergard W-Seal Surface-Mount Gas Filters

All-metal W-seal gas filters for ultrapure surface-mount applications
 
  • Entegris’ best filters in a W-seal surface mount design
  • Ideal for high-temperature and dynamic-pressure applications
  • Available with stainless steel membrane for inert, hydride and CO gases
  • Available with nickel membrane for inert and reactive gases
 
Wafergard W-Seal Surface-Mount Gas Filters
Materials:Filter element: Stainless steel membrane or patented, sintered nickel membrane
Housing, base block and end cap: 316L double-melt stainless steel
Surface finish interior: <=5 μin Ra
Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec.
Downstream cleanliness:Particles: Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm
Volatiles: Volatile outgassing of H2O, O2 and THC is below detectable limits (by RGA and FID at room temperature)
Particle retention:Nickel membrane: Greater than 99.9999999% (9 LRV) removal of all particles (referenced at the most penetrating particle size)
Stainless membrane: Greater than 99.9999% (6 LRV) removal of all particles (referenced at the most penetrating particle size)
Removal rating:>=0.003 μm
Operating conditions:Maximum operating pressure: 1 MPa (10 bar, 145 PSID)
Maximum forward/reverse differential pressure: 1 MPa (10 bar, 145 PSID)
Maximum operating temperature: 400°C (752°F)
Flow rating:Refer to performance data
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