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Wafergard III NF-750 Gas Filters

Superior particulate filtration for high-purity gas system filtration

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Cleanest, most efficient all-metal filters available
Patented nickel filter membrane offers superior corrosion resistance and excellent compatibility with inert and reactive gases. (Not recommended for use with CO, O₃ and low-level hydride dopant gases.)
Ideal for high-temperature and dynamic-pressure applications
Typically used for flows up to 750 SLPM

Wafergard III NF-750 Gas Filters

Materials:	Filter element: Patented, sintered nickel membrane filter.
	Housing: Electropolished VAR 316L stainless steel housing
	Surface finish interior: <=5 μin Ra
	Helium leak rating: Qualified 2`10-10 atm-cc/sec. Tested 1`10-9 atm-cc/sec.
	Total flow area: 140.0 cm²
Downstream cleanliness:	Particles(1): Less than 0.03 particles/Liter (<1 particle/ft³) greater than 0.01 μm at 300 SLPM
	Volatiles: Volatile outgassing of H₂O, O₂ and THC is below detectable limits (by RGA and FID at room temperature)
Particle retention:	Greater than 99.9999999% (9 LRV) removal of all particles at 300 SLPM, greater than 00.0000% (6 LRV) removal of all particles at 750 SLPM (referenced at the most penetrating particle size)
Removal rating:	>=0.003 μm
Operating conditions:	Maximum flow rate: 750 SLPM
	Maximum inlet pressure: 52 bar (750 PSI) at 100°C
	Maximum forward/reverse differential pressure: 7 bar (100 PSID)
	Maximum operating temperature: Inert gases 400°C at 27.5 bar (400 PSI); Corrosive and reactive gases: 50°C at 52 bar (7500 PSI)
Flow rating:	Refer to performance data
Warranty:	5 year
Note:	(1) Verified at 100 SLPM for 1/4” gasket seal fitting (compatible with VCR® fitting).