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Guardian Plus HPM Cartridge Filters

For use in ammonium hydroxide and TMAH, copper plating solutions, low temperature organic resist strippers (without peroxide) and similar chemistries
 
Guardian Plus HPM Cartridge Filters
  • HPM cartridge filters provide nearly double the membrane area in a standard ATX style disposable filter design
  • High flow membrane with ultra-large filtration area provides rapid particle removal and microbubble control for faster bath startup and system qualification
 
Guardian Plus HPM Cartridge Filters
Materials:Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE)
Supports, core, sleeve, and endcaps: High-density polyethylene (HDPE)
O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer (TEV) O-ring, or Teflon® fluoropolymer encapsulated EPDM (TEE) O-ring
Connections:Code 0 (2-222)
Retention ratings:0.05 μm and 0.1 μm
Membrane area:10”: 19000 cm2 (20.45 ft2)
20”: 38000 cm2 (40.90 ft2)
Maximum operating conditions:Maximum inlet pressure: 0.34 MPa (3.4 bar; 50 PSI) at 25°C
Maximum forward/reverse differential pressure: 0.24 MPa (2.4 bar; 35 PSID) at 25°C
Maximum operating temperature: 60°C (at the above conditions)
Compatibility:Recommended for use in ammonium hydroxide and TMAH, copper plating solutions, low temperature organic resist strippers (without peroxide).
Cleanliness:Filter contributes <2 particles/mL >=0.2 μm after five-minute flush at 5 L/min.