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Guardian™ Plus HPM Cartridge Filters

For use in ammonium hydroxide and TMAH, copper plating solutions, low-temperature organic resist strippers (without peroxide) and similar chemistries
Data Sheet (211602)
 
Guardian™ Plus HPM Cartridge Filters
  • HPM cartridge filters provide nearly double the membrane area in a standard ATX style disposable filter design
  • High-flow membrane with ultra-large filtration area provides rapid particle removal and microbubble control for faster bath startup and system qualification
 
Guardian™ Plus HPM Cartridge Filters
Materials:
 Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE)

Supports, core, sleeve and endcaps: High-density polyethylene (HDPE)

O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer (TEV) O-ring, or Teflon® fluoropolymer encapsulated EPDM (TEE) O-ring
Connections:
 Code 0 (2-222)
Retention ratings:
 0.05 μm and 0.1 μm
Membrane area:
 10”: 19000 cm2 (20.45 ft2)

20”: 38000 cm2 (40.90 ft2)
Maximum operating conditions:
 Maximum inlet pressure: 0.34 MPa (3.4 bar; 50 PSI) at 25°C

Maximum forward/reverse differential pressure: 0.24 MPa (2.4 bar; 35 PSID) at 25°C

Maximum operating temperature: 60°C (at the above conditions)
Compatibility:
 Recommended for use in ammonium hydroxide and TMAH, copper plating solutions, low temperature organic resist strippers (without peroxide).
Cleanliness:
 Filter contributes <2 particles/mL >=0.2 μm after five-minute flush at 5 L/min.

Ordering Information

Part Number Description Membrane/
Media/M.O.C.* 		Retention Rating Connection Size O-Ring
GUCZ01M01 Guardian® Plus HPM Liquid Filter Cartridge UPE 0.50 N/A 10 Code 0 TEV®
GUCZ01MT1 Guardian® Plus HPM Liquid Filter Cartridge UPE 0.05 N/A 10 Code 0 TEV®
GUCZ02M01 Guardian® Plus HPM Liquid Filter Cartridge UPE 0.05 N/A 20 Code 0 TEV®
GUCZ02MT1 Guardian® Plus HPM Liquid Filter Cartridge UPE 0.05 N/A 20 Code 0 TEV®
GUCZ03MT1 Guardian® Plus HPM Liquid Filter Cartridge UPE 0.05 N/A 30 Code 0 TEV®
GUCV01MT1 Guardian® Plus HPM Liquid Filter Cartridge UPE 0.10 N/A 10 Code 0 TEV®
GUCV01M01 Guardian® Plus HPM Liquid Filter Cartridge UPE 0.10 N/A 10 Code 0 TEV®
GUCV02M01 Guardian® Plus HPM Liquid Filter Cartridge UPE 0.10 N/A 20 Code 0 TEV®
GUCV02MT1 Guardian® Plus HPM Liquid Filter Cartridge UPE 0.10 N/A 20 Code 0 TEV®

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