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Protego Metal Ion Purifier/Filters

High-capacity, single-pass removal of metal ion contamination from ultrapure water and some organic solvents
 
Protego Metal Ion Purifier/Filters
  • Deliver ultimate protection from metal ion contamination
  • Provides high-capacity, single-pass removal of metal ions from ultrapure water and some organic solvents
  • Ideal for critical cleaning applications including DI water rinse on recirculation and single-pass process tools, wafer dry and post-CMP clean
 
Protego Metal Ion Disposable Purifier
Materials:Metal removal medium: Polyethylene ion exchange media
Supports (upstream, downstream, and mold): High-density polyethylene (HDPE)
Connections:1/4” Swagelok® fittings
Maximum operating conditions:Maximum inlet pressure: 0.34 MPa (3.4 bar, 50 PSI) at 25°C
Maximum forward/reverse differential pressure: 0.27 MPa (2.7 bar, 40 PSI) at 25°C
Maximum operating temperature: 60°C (140°F)