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QuickChange ATE Filters

The proven high-flow solution for critical aqueous chemistry filtration

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ATE membrane technology delivers high flow and superior retention performance
Increased membrane area for higher flow at 30nm retention rating for rapid bath cleanups
Nondewetting PTFE membrane technology eliminates the need for prewetting and flushing cycles
Recommended for use with aqueous-based chemicals at ambient temperatures (including H₂SO₄, H₂PO₄, HNO₃, HF, HCl, BOE, NH₄F, H₂O₂, TMAH, NH₄OH and ozonated water) and elevated temperature applications (including SC1, SC2, SPM nitride etch, metal etch and various other organic-resist strippers).
Field proven reliability developed from the Mykrolis® contamination control technologies

QuickChange ATE Filters

Materials:	Membrane: Prewet, nondewetting PTFE
	Supports: PFA
	O-rings: TEV, Chemraz® or Kalrez® perfluoroelastomers
Retention ratings:	0.03 μm, 0.05 μm and 0.1 μm
Membrane area:	18,000 cm² (19.4 ft²)
Maximum operating conditions:	Maximum forward differential pressure: 0.44 MPa (4.41 bar; 64 PSID) at 25°C; 0.05 MPa (0.51 bar; 7.5 PSID) at 180°C
	Maximum reverse differential pressure: 0.35 MPa (3.5 bar; 50 PSID) at 25°C
	Maximum operating temperature: 180°C (at the above conditions)
Compatibility:	Entegris recommends QuickChange filters for use with aqueous-based chemicals at ambient temperatures (including H₂SO₄, H₂PO₄, HNO₃, HF, HCl, BOE, NH₄F, H₂O₂, TMAH, NH₄OH and ozonated water) and elevated temperature applications (including SC1, SC2, SPM nitride etch, metal etch and various other organic-resist strippers).
Metallic cxtractables:	Cartridges:
Metallic cxtractables:	Disposables: Guaranteed levels to <25 μg/device (17 ppb in 1.5L 10% HCl)