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Fluorogard® AT Filters

All-Teflon® membrane filter for wet etch and clean applications
Data Sheet (310430)
 
Fluorogard® AT Filters
  • Ideal for higher temperature applications
  • All-fluoropolymer materials of construction provide a broad range of chemical compatibility
  • Highly retentive hydrophobic PTFE membrane and PFA supports provide superior resistance in strong chemical processing, pulsing, and high pressure applications
 
Fluorogard® AT Cartridge Filters
Materials:
 Membrane: Pleated hydrophobic PTFE

Supports: PFA supports, core, sleeve and end caps

O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer O-ring (TEV), Chemraz® or Kalrez® perfluoroelastomer resin
Connections:
 Code 0 (2-222)
Maximum operating conditions:
 Maximum forward differential pressure: 0.51 MPa (5.1 bar, 75 PSID) at 25° C; 0.051 MPa (0.51 bar, 7.5 PSID) at 150°C

Maximum reverse differential pressure: 0.35 MPa (3.5 bar, 50 PSID) at 25°C

Maximum operating temperature: 150°C (302°F)
Membrane area:
 10”: 9000 cm2 (9.7 ft2)

20”: 18000 cm2 (19.4 ft2)
Performance:
 Cleanliness: Cleanliness: Filter contributes < 2 particles/mL >=0.2 μm after five-minute flush at 5 L/min.
Fluorogard® ATX Cartridge Filters
Materials:
 Membrane: Pleated hydrophobic PTFE

Supports: PFA supports, core, sleeve and end caps

O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer O-ring (TEV), Chemraz® or Kalrez® perfluoroelastomer resin
Connections:
 Code 0 (2-222)
Maximum operating conditions:
 Maximum forward differential pressure: 0.51 MPa (5.1 bar, 75 PSID) at 25°C

Maximum reverse differential pressure: 0.35 MPa (3.5 bar, 50 PSID) at 25°C

Maximum operating temperature: 150°C (302°F)
Membrane area:
 10”: 13000 cm2 (14 ft2)
Performance:
 Cleanliness: Filter contributes <2 particles/mL >=0.2 μm after five-minute flush at 5 L/min.
Fluorogard® ATE Filters
Materials:
 Membrane: PTFE

Supports: PFA

Cartridge o-rings: Chemraz®, Kalrez® 4079, Teflon® encapsulated Viton® (TEV), Teflon encapsulated Viton® Extreme™ ETP, Teflon encapsulated EPDM/EPR (TEE)

Disposable shell: PFA
Retention ratings:
 Dry: 0.1, 0.05 and 0.03 μm
Membrane surface area:
 >2.2 m2
Maximum operating conditions:
 Maximum forward differential pressure: 0.44 MPa (4.4 bar; 64 PSI) @ 25°C; 0.05 MPa (0.5 bar; 7.5 PSI) @ 180°C

Maximum reverse differential pressure: 0.35 MPa (3.5 bar; 50 PSI) @ 25°C

Maximum operating temperature: 180°C (at the above conditions)
Particle cleanliness:
 <15 particles/10 mL ≥0.2 μm after a 5-minute flush at 5 L/min
Metallic extractable levels:
 <40 μg/10” element


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