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Etchgard HP and HPX Cartridge Filters

Hydrophilic, high-performance filters for HF and BOE recirculation bath processes
 
Etchgard HP and HPX Cartridge Filters
  • Designed for use with Chemlock® housings for rapid filter changeout
  • High flow membrane provides rapid particle removal and microbubble control for faster bath startup and system qualification
  • Patented hydrophilic membrane structure eliminates nucleation sites to reduce the potential for microbubble formation
  • HPX: High membrane area - 11000 cm2 (11.8 ft.2), provides high flow at minimal pressure drop with long-life process capacity
 
Etchgard HP Cartridge Filters
Materials:
Membrane patented hydrophilic ultra-high molecular weight polyethylene (UPE)

Supports, core and sleeve: High-density polyethylene (HDPE)

O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer (TEV)
Connections:
Code 0 (2-222)
Membrane area:
10”: 8,500 cm2 (9.2 ft.2)
Maximum operating conditions:
Maximum forward/reverse differential pressure: 0.34 MPa (3.4 bar, 50 PSID) at 23°C

Maximum operating temperature: 60°C (140°F)
Cleanliness:
Filter contributes <=2 parts/mL >=0.2 μm after five-minute flush at 5 L/min.
Etchgard HPX Cartridge Filters
Materials:
Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE)

Supports, core and sleeve: High-density polyethylene (HDPE)

O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer (TEV)
Connections:
Code 0 (2-222)
Membrane area:
4”: 5000 cm2 (5.4 ft.2)

10”: 11000 cm2 (11.8 ft.2)
Maximum operating conditions:
Maximum forward/reverse differential pressure: 0.34 MPa (3.4 bar, 50 PSID) at 23°C

Maximum operating temperature: 60°C (140°F)
Cleanliness:
Filter contributes <=2 parts/mL >=0.2 μm after five-minute flush at 5 L/min.
Etchgard HPX Disposable Filters
Materials:
Membrane Patented hydrophilic ultra-high molecular weight polyethylene (UPE)

Core and sleeve: High-density polyethylene (HDPE)

Shell: Polypropylene
Connections:
Inlet/outlet: 3/8”, 1/2”, 3/4” or 1” Flaretek® compatible fittings

Vents and drains: 1/4” Flaretek® compatible fittings
Membrane area:
4”: 5000 cm2 (5.4 ft.2)

10”: 11000 cm2 (11.8 ft.2)
Maximum operating conditions:
Maximum forward/reverse differential pressure: 0.34 MPa (3.4 bar, 50 PSID) at 23°C

Maximum operating temperature: 70°C (158°F)
Cleanliness:
Filter contributes <=2 parts/mL >=0.2 μm after five-minute flush at 5 L/min.