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Fluorogard AT Filter Family

All Teflon® membrane filter for wet etch and clean applications
 
Fluorogard AT Filter Family
  • Ideal for higher temperature applications
  • All-fluoropolymer materials of construction provide a broad range of chemical compatibility
  • Highly retentive hydrophobic PTFE membrane and PFA supports provide superior resistance in strong chemical processing, pulsing, and high pressure applications
 
Fluorogard AT Cartridge Filters
Materials:Membrane: Pleated hydrophobic PTFE
Supports: PFA supports, core, sleeve and end caps
O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer O-ring (TEV), Chemraz® or Kalrez® perfluoroelastomer resin
Connections:Code 0 (2-222)
Maximum operating conditions:Maximum forward differential pressure: 0.51 MPa (5.1 bar, 75 PSID) at 25° C; 0.051 MPa (0.51 bar, 7.5 PSID) at 150°C
Maximum reverse differential pressure: 0.35 MPa (3.5 bar, 50 PSID) at 25°C
Maximum operating temperature: 150°C (302°F)
Membrane area:10”: 9000 cm2 (9.7 ft2)
20”: 18000 cm2 (19.4 ft2)
Performance:Cleanliness: Cleanliness: Filter contributes < 2 particles/mL >=0.2 μm after five-minute flush at 5 L/min.
Fluorogard AT Disposable Filters
Materials:Membrane: Pleated hydrophobic PTFE
Supports: PFA supports, core, sleeve and end caps
Shell: PFA
Maximum operating conditions:Maximum operating pressure: 0.579 MPa (5.79 bar; 84 PSI) at 25° C; 0.0517 MPa (0.517 bar; 7.5 PSI) at 150°C
Maximum forward differential pressure: Filters: 0.441 MPa (4.41 bar; 64 PSID) at 25°C
Maximum reverse differential pressure: 0.35 MPa (3.5 bar, 50 PSID) at 25°C
Maximum operating temperature: 150°C (302°F) at 0.05 MPa (0.5 bar; 7.25 PSI)
Membrane area:4”: 3,600 cm2 (3.86 ft2)
10”: 9,000 cm2 (9.67 ft2)
Performance:Cleanliness: Filter contributes <2 particles/mL >=0.2 μm after five-minute flush at 5 L/min.
Fluorogard ATX Cartridge Filters
Materials:Membrane: Pleated hydrophobic PTFE
Supports: PFA supports, core, sleeve and end caps
O-rings: Teflon® fluoropolymer encapsulated Viton® fluoroelastomer O-ring (TEV), Chemraz® or Kalrez® perfluoroelastomer resin
Connections:Code 0 (2-222)
Maximum operating conditions:Maximum forward differential pressure: 0.51 MPa (5.1 bar, 75 PSID) at 25°C
Maximum reverse differential pressure: 0.35 MPa (3.5 bar, 50 PSID) at 25°C
Maximum operating temperature: 150°C (302°F)
Membrane area:10”: 13000 cm2 (14 ft2)
Performance:Cleanliness: Filter contributes <2 particles/mL >=0.2 μm after five-minute flush at 5 L/min.
Fluorogard ATX Disposable Filters
Materials:Membrane: Pleated hydrophobic PTFE
Supports: PFA supports, core, sleeve and end caps
Shell: PFA
Membrane area:4”: 5000 cm2 (5.38 ft2)
10”: 13000 cm2 (14 ft2)
Maximum operating conditions:Maximum operating pressure: 0.579 MPa (5.79 bar; 84 PSI) at 25° C; 0.0517 MPa (0.517 bar; 7.5 PSI) at 150°C
Maximum forward differential pressure: 0.441 MPa (4.41 bar; 64 PSID) at 25°C
Maximum reverse differential pressure: 0.35 MPa (3.5 bar, 50 PSID) at 25°C
Maximum operating temperature: 150°C (302°F) at 0.05 MPa (0.5 bar; 7.25 PSI)
Cleanliness:Filter contributes <2 particles/mL >=0.2 μm after five-minute flush at 5 L/min.
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