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Guardian HPX Disposable Filters

Chemical delivery systems and photoresist residue removers
 
Guardian HPX Disposable Filters
  • Patented hydrophilic membrane (UPE) eliminates the need for prewetting or flushing, and simplifies installation
  • Eliminates prewetting and flushing. Saves time at changeout. Does not dewet in outgassing fluids. Increases equipment uptime. Provides longer life, more efficient filtration
  • Large membrane area enables high flow in chemical delivery systems
  • Disposable design for safer filter changeouts
 
Guardian HPX Disposable Filters
Materials:Membrane: Patented hydrophilic ultra-high molecular weight polyethylene (UPE)
Supports, core and sleeve: High-density polyethylene (HDPE)
Disposable shell: Polypropylene
Fittings:Inlet/Outlet: 3/8”, 1/2”, 3/4” or 1” Flaretek® compatible fittings
Vents and Drains: 1/4” Flaretek® compatible fittings
Membrane area:4”: 5,000 cm2 (5.4 ft2)
10”: 11,000 cm2 (11.8 ft2)
Operating conditions:Maximum forward/reverse differential pressure: 3.4 bar (50 PSID) at 23°C
Cleanliness:Filter contributes <2 particles/mL >=0.2 μm after five-minute flush at 5 L/min.
Notes:Recommended for use in chemical delivery systems, single pass and spray tool applications using HF, BOE and NH4F. Consult Entegris for other applications.