Close
 
header top curve
Home   >   Industries   >   Semiconductor   >   Wet Etch and Clean   >   Fluorogard® Filters   >   Fluorogard® ATE UCM Ultra Clean Organic Solvent Filter

Industries

Select one or more of the following fields in order to begin your search.
  Search by Industry   Applications or process step   Keyword or Product Name      
   and/or   and/or      Search

Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, wafercare.com, entegris-services.com, or entegrisfuelcells.com)

Fluorogard® ATE UCM 20 nm Cartridge Filter - Ultra Clean

High-volume organic solvent filter
 
  • High-retention rating at 20 nm improves single-pass retention efficiency improves chemical cleanliness
  • Low particle shedding improves chemical cleanliness
  • Ultra-low extractables level improves chemical cleanliness
  • Higher surface area using the ATE M pleat structure improves filter lifetime and lowers pressure drop (less stress on other components such as pumps)
  • All-fluoropolymer construction provides the best chemical compatibility in a multitude of applications
 
Fluorogard® ATE UCM 20 nm Cartridge Filter - Ultra Clean
Materials:
Membrane: PTFE

Supports, core, sleeve: PFA

Cartridge o-rings: Teflon® encapsulated Viton® Extreme™ ETP (E-ETP)
Retention ratings:
20 nm
Membrane surface area:
2.2 m2
Maximum operating conditions:
Maximum forward differential pressure: 0.44 MPa (4.4 bar; 64 PSi) @25°C, 0.05 MPa (0.5 bar; 7.5 PSi) @ 180°C

Maximum reverse differential pressure: 0.35 MPa (0.5 bar; 7.5 PSi) @ 180°C

Maximum operating temperature: 180°C (at the above conditions)
Particle cleanliness:
<15 particles/10 mL >/= 0.2 µm after a 5-minute flush at 5 L/min
Metallic extractable levels:
<10 µg/10" element (100% tested)