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QuickChange UCM Filter

Ultra Clean nondewetting PTFE membrane filters providing unparalleled cleanliness for metallic and ionic extractables
 
QuickChange UCM Filter
  • Ultra-low metallic and ionic extractable levels
  • Nondewetting PTFE membrane filter prewet and packaged in ultrapure DI water
  • Recommended for aqueous-based chemicals at ambient temperatures (including H2SO4, H3PO4, HNO3, HF, HCl, BOE, NH4F, H2O2, TMAH, NH4OH, and ozonated water) and elevated temperature applications (including SC1, SC2, piranha etch, nitride etch and metal etch)
 
QuickChange UCM ACM
Materials:Membrane: Prewet, nondewetting PTFE
Supports: PFA
Disposable shell: PFA, containing ultrapure DI water
Retention ratings:0.03 μm, 0.05 μm, 0.1 μm and 0.2 μm
Membrane area:18000 cm2 (19.4 ft2)
Maximum operating conditions:Maximum operating pressure: 0.58 MPa (5.8 bar; 84 PSI) at 25°C; 0.17 MPa (1.7 bar; 25 PSI) at 180°C
Maximum forward differential pressure: 0.44 MPa (4.41 bar; 64 PSID) at 25°C; 0.05 MPa (0.51 bar; 7.5 PSID) at 180°C
Maximum reverse differential pressure: 0.35 MPa (3.5 bar; 50 PSID) at 25°C
Maximum operating temperature: 180°C (at the above conditions)
Guaranteed extractables:Metalics: to <3.0 μg/device (12 elements)
Residual chlorine: <100 ppb
TOC: <50 ppb
Compatibility:Recommended for use with aqueous-based chemicals at ambient temperatures (including H2SO4, H2PO4, HNO3, HF, HCl, BOE, NH4F, H2O2, TMAH, NH4OH and ozonated water) and elevated temperature applications (including SC1, SC2, piranha etch and metal etch).
QuickChange UCM ACX
Materials:Membrane: Prewet, nondewetting PTFE
Supports: PFA
Disposable shell: PFA, containing high-purity DI water
Retention ratings:0.03 μm, 0.05 μm, 0.1 μm and 0.2 μm
Membrane area:4”: 5000 cm2 (5.4 ft2)
10”: 13000 cm2 (14.0 ft2)
Maximum operating conditions:Maximum operating pressure: 0.58 MPa (5.8 bar; 84 PSI) at 25°C; 0.0517 MPa (0.517 bar; 7.5 PSI) at 150°C
Maximum forward differential pressure: 0.44 MPa (4.41 bar; 64 PSID) at 25°C; 0.05 MPa (0.51 bar; 7.5 PSID) at 150°C
Maximum reverse differential pressure: 0.35 MPa (3.5 bar; 50 PSID) at 25°C
Maximum operating temperature: 150°C (at the above conditions)
Guaranteed extractables:Metalics: to <3.0 μg/device (12 elements)
Residual chlorine: <100 ppb
TOC: <50 ppb
Compatibility:Recommended for use with aqueous-based chemicals at ambient temperatures (including H2SO4, H2PO4, HNO3, HF, HCl, BOE, NH4F, H2O2, TMAH, NH4OH, and ozonated water) and elevated temperature applications (including SC1, SC2, piranha etch and metal etch).