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Guardian™ Filters

Multi-use UPE and PTFE liquid filters

Developed from the Mykrolis® contamination control technologies, each Guardian™ liquid filter provides a cost-effective solution to a variety of chemical filtration challenges. Featuring both UPE and PTFE membrane technology, the Guardian family is ideal for high-pH solutions as well as copper and nickel plating applications.
Guardian AT Filters
Hydrophobic membrane for ultra-high purity chemicals
  • Ideal for higher temperature applications
  • All-fluoropolymer materials of construction provide a broad range of chemical compatibility. Suitable for a variety of chemicals and solvents
  • Highly retentive hydrophobic PTFE membrane made of Telfon® fluoropolymer resin provides excellent removal of small, critical-size particles to ensure low particle counts in chemical delivery systems
  • ATX: Large membrane surface area to deliver high flow rates at minimal pressure drop
Guardian DEV Filters
Low-cost solution for KOH and TMAH based developer solution and other high pH chemical filtration applications
  • Patented hydrophilic UPE membrane spontaneously wets to enable rapid system startup
  • All polyethylene construction provides excellent chemical compatibility and long lifetime in a cost-effective device
Guardian ECD Cartridge Filters
Hydrophilic, high-flow inert membrane with excellent flow/retention properties, ideal solution for wet cleans and CuECD
  • Provide excellent chemical compatibility, downstream chemical cleanliness, reduced system startup times, and long lifetime
  • Highly hydrophilic surfaces reduce the potential for microbubble formation
  • High-flow asymmetric membrane delivers excellent performance while minimizing system pressure drop
  • Non-interactive surfaces will not react with typical plating additives and related process chemistries – ensures ultimate process protection
Guardian HPX Disposable Filters
Chemical delivery systems and photoresist residue removers
  • Patented hydrophilic membrane (UPE) eliminates the need for prewetting or flushing, and simplifies installation
  • Eliminates prewetting and flushing. Saves time at changeout. Does not dewet in outgassing fluids. Increases equipment uptime. Provides longer life, more efficient filtration
  • Large membrane area enables high flow in chemical delivery systems
  • Disposable design for safer filter changeouts
Guardian Plus HPM Cartridge Filters
For use in ammonium hydroxide and TMAH, copper plating solutions, low temperature organic resist strippers (without peroxide) and similar chemistries
  • HPM cartridge filters provide nearly double the membrane area in a standard ATX style disposable filter design
  • High flow membrane with ultra-large filtration area provides rapid particle removal and microbubble control for faster bath startup and system qualification