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Guardian™ Filters

Multi-use UPE and PTFE liquid filters
Guardian liquid filters provide a cost-effective solution to a variety of chemical filtration challenges. Featuring both UPE and PTFE* membrane technology, the Guardian family is ideal for high-pH solutions as well as copper and nickel plating applications.

* For Industrial Use Only.  Not for use in food, drug, cosmetic or medical devices manufacturing, processing or packaging operations
Guardian® DEV and Guardian Plus HPM Filters
High retention, hydrophilic UPE membrane filters for KOH and TMAH based developer solutions and other high pH chemical filtration applications
  • Hydrophilic UPE membrane: Superior wettability eliminates prewetting and flushing steps, saving time at changeout. Does not dewet in outgassing fluids, increasing equipment uptime.
  • Available in retention ratings of 0.05 and 0.1 µm: Multiple retention ratings cover a broad scope of process requirements
  • Large membrane surface area: Enables high flow rates in chemical delivery systems, while maintaining excellent ultrafine particle retention and longer lifetime
  • Polyethylene construction: Provides excellent chemical compatibility and long lifetime in a cost-effective device
Guardian™ ECD Cartridge Filters
Hydrophilic, high-flow inert membrane with excellent flow/retention properties, ideal solution for wet cleans and CuECD
  • Provide excellent chemical compatibility, downstream chemical cleanliness, reduced system startup times and long lifetime
  • Highly hydrophilic surfaces reduce the potential for microbubble formation
  • High-flow asymmetric membrane delivers excellent performance while minimizing system pressure drop
  • Non-interactive surfaces will not react with typical plating additives and related process chemistries – ensures ultimate process protection
Guardian™ AT Filters
Hydrophobic membrane for ultra-high purity chemicals
  • Ideal for higher temperature applications
  • All-fluoropolymer materials of construction provide a broad range of chemical compatibility. Suitable for a variety of chemicals and solvents
  • Highly retentive hydrophobic PTFE membrane made of Telfon® fluoropolymer resin provides excellent removal of small, critical-size particles to ensure low particle counts in chemical delivery systems
  • ATX: Large membrane surface area to deliver high flow rates at minimal pressure drop
  • For Industrial Use Only. Not for use in food, drug, cosmetic or medical devices manufacturing, processing or packaging operations