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Special Note: Some product links may direct you to our peripheral websites (devicecare.com, diskcare.com, entegrisfluidhandling.com, entegrisfuelcells.com, entegrislifesciences.com, pvprocesssolutions.com, or wafercare.com)

NT® Sensing and Control Devices

Utilizing innovative designs, high-performance and high-purity materials, Entegris offers leading edge technology for dispensing today's variety of slurries used in CMP tools. NT® sensing and control devices provide accuracy and reliability while preventing slurry agglomeration or shear.


NT® Integrated Flow Controller, Model 6510 Designed for point-of-use CMP slurry and chemical cleaning dispense applications
	PTFE, PFA, CTFE and Kalrez® wetted surfaces for high-purity applications Integral pressure transducer for additional process information LED status and discrete alarm output Precise flow control for CMP polish and cleaning processes

NT® Electronic Flowmeter, Model 4400 Flow and pressure measurements not affected by bubbles
	No moving parts to generate particles Wetted parts are nonmetallic materials, PTFE, PFA, CTFE and Kalrez® for use with a wide range of high-purity, aggressive and corrosive chemicals and slurries 1% full scale accuracy for critical measurements

NT® Pressure Transducers Nonmetallic pressure sensing technology for use in CMP slurry and chemical cleaning applications
	Wetted parts are nonmetallic materials, PTFE, PFA, CTFE and Kalrez®, which are safe and dependable in high-purity, corrosive chemicals and slurries No moving parts or fill fluids, reducing contamination potential Robust design provides reliable measurement

NT® Conductivity Sensor, Model 8800 and NT® Conductivity Analyzer, Model 8850 Non-intrusive, electrodeless conductivity sensor enables high-accuracy conductivity measurement
	Unique patented sensor/toroid design for accuracy, sensitivity and wide rangeability Entegris PureBond® flowpath Available in 1/2", 3/4" and 1" line sizes with Flaretek® or Pillar® S300 connections Secure data and calibrations

NT® Proportional Control Valves, Model 6300 Advanced motor driver technology provides smooth, precise linear control
	PFA and PTFE wetted surfaces for high-purity applications Nonmetallic components for corrosion resistance Robust disphragm construction for containment and contamination protection Optimized seat and diaphragm design to minimze dead volume and fluid shear Compact footprint for installations where space is limited