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Fluorogard® Filters

PTFE membrane filter for a broad range of applications

Fluorogard® filters are designed to efficiently remove particles from a broad range of acids, bases, solvents and other process chemicals in semiconductor, flat panel display and data storage manufacturing applications. Featuring PTFE* membranes, Fluorogard filters are available in hydrophobic and hydrophilic membranes. These filters are recommended for medium to high flow applications.

* For Industrial Use Only.  Not for use in food, drug, cosmetic or medical devices manufacturing, processing or packaging operations
Fluorogard® ATE Filters
All-PTFE filters with broad chemical and temperature range compatibility for high flow and low cost of ownership
  • Increased yield, higher throughput through improved chemical cleanliness: retention rating down to 0.03 μm; low particle shedding; low extractable level
  • Faster bath cleanup, lower COO through higher surface area using M-pleat structure
  • Higher flow, longer lifetime, lower pressure drop (less stress on other components like pumps, etc.)
  • Available in a prewet version for quicker/easier installation with no solvent needed for prewetting and no flushing required
Fluorogard® ATE UCM 20 nm Cartridge Filter - Ultra Clean
High-volume organic solvent filter
  • High-retention rating at 20 nm improves single-pass retention efficiency improves chemical cleanliness
  • Low particle shedding improves chemical cleanliness
  • Ultra-low extractables level improves chemical cleanliness
  • Higher surface area using the ATE M pleat structure improves filter lifetime and lowers pressure drop (less stress on other components such as pumps)
  • All-fluoropolymer construction provides the best chemical compatibility in a multitude of applications
Fluorogard® AT Filters
All-Teflon® membrane filter for wet etch and clean applications
  • Ideal for higher temperature applications
  • All-fluoropolymer materials of construction provide a broad range of chemical compatibility
  • Highly retentive hydrophobic PTFE membrane and PFA supports provide superior resistance in strong chemical processing, pulsing, and high pressure applications
Fluorogard® FP Filter Family
PTFE membrane filter for flat panel display manufacturing applications
  • Hydrophillc and Hydrophobic membranes available
  • Durable PTFE Membrane
  • Polypropylene (PP) construction
  • No prewetting required
Fluorogard® RS Filter Family
PTFE membrane filter for photoresist residue removal applications
  • High-capacity multiple layer, membrane optimized structure and layering technology
  • Available in cartridges and disposable filters. Disposables available with Flaretek®, Pillar® and Flowell® compatible fittings
  • Provides excellent gel and small particle retention in a single cartridge design
  • High-flow cartridge design with optimized membrane pleating